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Brooks – Brooks Instrument GF81 User Manual

Page 49

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5-3

Brooks

®

GF40/GF80/GF81 Devices

Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013

Section 5 Product Description Code

Table 5-2 GF81 Series Product Description Code Table

Code Description

Code Description

Code Description

Code Description

Code Description

Code Option

Code Option

Code Option

Code Option

Code Option Option Description

Option Description

Option Description

Option Description

Option Description

I.

I.

I.

I.

I.

Base Model Code

G F 0 8 1

G F 0 8 1

G F 0 8 1

G F 0 8 1

G F 0 8 1

Metal/Hi-flow (51-300 slpm N

2

Eq)

II.

II.

II.

II.

II.

Configurability

XXXXX

Specific Gas & Range Required

III.

III.

III.

III.

III. Special Application

XX

XX

XX

XX

XX

Standard

IV

IV

IV

IV

IV..... Valve Configuration

CCCCC

Normally Closed Valve

M

M

M

M

M

Meter (No Valve)

VVVVV.....

Gas or Range

XXXX XXXX

XXXX XXXX

XXXX XXXX

XXXX XXXX

XXXX XXXX

Specific Gas Code & Range, example: “0007” = Hydrogen and “200L” = 200 slpm

VI.

VI.

VI.

VI.

VI. Fitting

V 1

V 1

V 1

V 1

V 1

1 -1/2" body width, 1/2" VCR, 134.2 mm

VII.

VII.

VII.

VII.

VII. Downstream Condition

AAAAA

Atmospheric

VVVVV

Vacuum

PPPPP

Positive Pressure

VIII.

VIII.

VIII.

VIII.

VIII. External Seal/Valve Seat

SSSSS

Metal Seal/Metal Seat

IX.

IX.

IX.

IX.

IX.

Communications/

P 5

P 5

P 5

P 5

P 5

Profibus/Analog (Input 0-5 V; Output 0-5 V); 9-Pin Female D conn./15-Pin Male D conn.

Connector

P 0

P 0

P 0

P 0

P 0

Profibus/Analog (Input 0-20 mA; Output 0-20 mA); 9-Pin Female D conn./15-Pin Male D conn.

P 4

P 4

P 4

P 4

P 4

Profibus/Analog (Input 4-20 mA; Output 4-20 mA); 9-Pin Female D conn./15-Pin Male D conn.

L 5

L 5

L 5

L 5

L 5

RS485 (L-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Pin alignment with Brooks SLA SII)

L 1

L 1

L 1

L 1

L 1

RS485 (L-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Pin alignment with Celerity Power)

L 0

L 0

L 0

L 0

L 0

RS485 (L-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

L 4

L 4

L 4

L 4

L 4

RS485 (L-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

A 5

A 5

A 5

A 5

A 5

RS485 (A-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Pin alignment with Brooks SLA SII)

A 1

A 1

A 1

A 1

A 1

RS485 (A-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Pin alignment with Brooks SLA SII)

A 0

A 0

A 0

A 0

A 0

RS485 (A-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

A 4

A 4

A 4

A 4

A 4

RS485 (A-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

S 5

S 5

S 5

S 5

S 5

RS485 (S-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Pin alignment with Brooks SLA SII)

S 1

S 1

S 1

S 1

S 1

RS485 (S-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Pin alignment with Brooks SLA SII)

S 0

S 0

S 0

S 0

S 0

RS485 (S-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

S 4

S 4

S 4

S 4

S 4

RS485 (S-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

D 5

D 5

D 5

D 5

D 5

DeviceNet®/Analog (Ouput 0-5 V); 5-pin micro signal and power/3-pin analog signal

X.

X.

X.

X.

X.

Customer Special Request

XXXX

XXXX

XXXX

XXXX

XXXX

Customer Special Request Number

XI.

XI.

XI.

XI.

XI.

Auto Shut-Off

AAAAA

Auto Shut-Off (Included)

XXXXX

Auto Shut-Off (Not Included)

XII.

XII.

XII.

XII.

XII. Auto Zero-Off

AAAAA

Auto Zero (Included)

XXXXX

Auto Zero (Not Included)

XII.

XII.

XII.

XII.

XII. Reference Temperature

00C

00C

00C

00C

00C

0 Deg C Reference

15C

15C

15C

15C

15C

15 Deg C Reference

20C

20C

20C

20C

20C

20 Deg C Reference

7 0 F

7 0 F

7 0 F

7 0 F

7 0 F

21.1 Deg C/70 Deg F Reference

Example Model Code

Example Model Code

Example Model Code

Example Model Code

Example Model Code

IIIII

II

II

II

II

II

III

III

III

III

III

I V

I V

I V

I V

I V

VVVVV

V I

V I

V I

V I

V I

VII

VII

VII

VII

VII

VIII

VIII

VIII

VIII

VIII

IX

IX

IX

IX

IX

XXXXX

XI

XI

XI

XI

XI

XII

XII

XII

XII

XII

XIII

XIII

XIII

XIII

XIII

G F 0 8 1

G F 0 8 1

G F 0 8 1

G F 0 8 1

G F 0 8 1

XXXXX

XX

XX

XX

XX

XX

CCCCC

----- 0013 100L

0013 100L

0013 100L

0013 100L

0013 100L -----

V 1

V 1

V 1

V 1

V 1

AAAAA

55555

P 5

P 5

P 5

P 5

P 5

----- XXXX

XXXX

XXXX

XXXX

XXXX

AAAAA

AAAAA

-----

00C

00C

00C

00C

00C

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