Brooks Instrument GF81 - Manual (Page 14)

1-8
Brooks ® GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013
Section 1 Introduction
Table 1-3 Specifications for Standard GF40/GF80 Series
See Tables 1-3 thru 1-5 for specifications for the GF40/GF80/GF81 Series.
See Figures 1-2 thru 1-5 for dimensions for the GF40/GF80/GF81 Series.
GF40 GF40 GF40 GF40 GF40 GF80 GF80 GF80 GF80 GF80
PPPPPerformance erformance erformance erformance erformance
Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N
22222
Eq.) Eq.) Eq.) Eq.) Eq.) 3 sccm to 50 slm
Flow Flow Flow Flow Flow Accur Accur Accur Accur Accuracy acy acy acy acy +1% S.P. 35-100%, +0.35% F.S. 2-35%
Repeatability & Repr Repeatability & Repr Repeatability & Repr Repeatability & Repr Repeatability & Reproducibility oducibility oducibility oducibility oducibility < + 0.2% S.P.
Linearity Linearity Linearity Linearity Linearity + 0.5% F.S. (included in accuracy)
Response Response Response Response Response Time (Settling Time (Settling Time (Settling Time (Settling Time (Settling Time) Time) Time) Time) Time) Normally Closed Valve < 1 sec. (within 2% for steps 0-10 through 0-100%)
Normally Open Valve < 3 sec (within 2% for steps 0-10 through 0-100%)
Con Con Con Con Contr tr tr tr trol Range ol Range ol Range ol Range ol Range 2-100%
MultiFlo MultiFlo MultiFlo MultiFlo MultiFlo optional
Number of Bins Number of Bins Number of Bins Number of Bins Number of Bins 10 bins
VVVVValve Shut Down alve Shut Down alve Shut Down alve Shut Down alve Shut Down < 1% of F.S.
ZZZZZer er er er ero Stability o Stability o Stability o Stability o Stability < + 0.5% F.S. per year
Pr Pr Pr Pr Pressur essur essur essur essure Coefficien e Coefficien e Coefficien e Coefficien e Coefficienttttt 0.03% per psi (0-50psi N
2
)
AAAAAttitude Sensitivity ttitude Sensitivity ttitude Sensitivity ttitude Sensitivity ttitude Sensitivity <0.25% span change @ 90 O after rezeroing (N
2
@ 50 psi)
Auto Z Auto Z Auto Z Auto Z Auto Zer er er er ero: o: o: o: o: Optional: (When Auto Zero is enabled the device performs the zero function once every time the set point returns to
zero. To accomplish, simply provide a zero set point.)
Auto shut-off: Auto shut-off: Auto shut-off: Auto shut-off: Auto shut-off: The Auto Shut-off feature closes the GF0xx valve when the set point drops below 1.5% of full scale
Ratings Ratings Ratings Ratings Ratings
Oper Oper Oper Oper Operating ating ating ating ating TTTTTemper emper emper emper emperatur atur atur atur ature Range e Range e Range e Range e Range 5-50 O C (41-122 O F)
Maximum Oper Maximum Oper Maximum Oper Maximum Oper Maximum Operating Pr ating Pr ating Pr ating Pr ating Pressur essur essur essur essureeeee 150 psig (10 bar)
Differ Differ Differ Differ Differen en en en ential Pr tial Pr tial Pr tial Pr tial Pressur essur essur essur essure Range e Range e Range e Range e Range 3-860 sccm = 7-45 psid, 861-7200 sccm = 15-45 psid, 7201-50000 sccm = 25-45 psid
Typical pressure drop, high density gases like Argon gas applications require an additional 10 psid differential pressure
Leak In Leak In Leak In Leak In Leak Integrity (External) tegrity (External) tegrity (External) tegrity (External) tegrity (External) 1x10 -9 atm. cc/sec He 1x10 -10 atm. cc/sec He
Mec Mec Mec Mec Mechanical hanical hanical hanical hanical
VVVVValve alve alve alve alve TTTTType ype ype ype ype Normally Closed, Normally Open, No Valve (Meter) Normally Closed, No Valve (Meter)
Primary Primary Primary Primary Primary W W W W Wetted Materials etted Materials etted Materials etted Materials etted Materials 316 Stainless Steel, Hastelloy C-22, 17-7 PH, 430SS
External Seals External Seals External Seals External Seals External Seals Viton, Buna, Kalrez, EPDM or Neoprene Metal/Nickel
In In In In Internal Seals/V ternal Seals/V ternal Seals/V ternal Seals/V ternal Seals/Valve Seat alve Seat alve Seat alve Seat alve Seat Viton, Buna, Kalrez, EPDM or Neoprene PFA/Kalrez
Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display
Status Lights: Status Lights: Status Lights: Status Lights: Status Lights: MFC Health, Network Status
Alarms*: Alarms*: Alarms*: Alarms*: Alarms*: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption
Diagnostic / Service P Diagnostic / Service P Diagnostic / Service P Diagnostic / Service P Diagnostic / Service Port: ort: ort: ort: ort: RS485 via 2.5mm jack
Compliance Compliance Compliance Compliance Compliance
En En En En Envir vir vir vir vironmen onmen onmen onmen onmental Compliance: tal Compliance: tal Compliance: tal Compliance: tal Compliance: CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Safety EN61010-1
RoHS
General, Leak-Test Traceability, Oxygen Cleaning, Calibration Traceability, Material Certification
*Alarm modes are dependant on the communications interface. These are described in the corresponding digital communication interface manual.