Brooks Instrument GF81 - Manual (Page 51)

A-1
Brooks ® GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013 Appendix A: GF40/GF80 Series Gas Table
Table A-1 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA40 to SA43
A GF40/GF80 Series Gas Table
Min inlet pressure for vac.
exhaust (PSIA)
Min inlet pressure for atm.
exhaust (PSIA) SA40 SA41 SA42 SA43
Gas Symbol
Gas
Code
Gas Name
Elastomer seal
GF040 SA40-
SA47 SA48 SA50
SA40-
SA47 SA48 SA50 Low High Low High Low High Low High
He 1 Helium Viton 19.7 24.7 29.7 21.3 25.1 29.7 5 14 15 42 43 128 129 400
Ne 2 Neon Viton 24.7 25.1 14.7 5 14 15 42 43 129 130 400
Ar 4 Argon Viton 24.7 29.7 44.7 25.1 29.7 44.7 5 14 15 42 43 130 131 400
Kr 5 Krypton Viton 29.7 29.7 4 11 12 32 33 100 101 300
Xe 6 Xenon Viton 24.7 25.1 3 6 7 19 20 58 59 178
H2 7 Hydrogen Viton 14.7 14.7 19.7 18.4 18.4 21.3 3 10 11 30 31 92 93 280
Air 8 Air Viton 24.7 29.7 25.1 29.7 3 10 11 30 31 92 93 280
CO 9 Carbon Monoxide Viton 24.7 29.7 25.1 29.7 3 10 11 30 31 92 93 280
HBr 10 Hydrogen Bromide Viton 24.7 25.1 3 8 9 25 26 77 78 235
HCl 11 Hydrogen Chloride EPDM 24.7 40.0 25.1 40.0 3 10 11 30 31 92 93 280
N2 13 Nitrogen Viton 24.7 29.7 32.7 25.1 29.7 32.7 3 10 11 30 31 92 93 280
D2 14 Deuterium Viton 14.7 14.7 18.4 18.4 3 10 11 30 31 94 95 280
O2 15 Oxygen Viton 24.7 29.7 34.7 25.1 29.7 34.7 3 10 11 30 31 92 93 280
NO 16 Nitric Oxide Viton,Kalrez 24.7 29.7 25.1 29.7 3 10 11 30 31 92 93 280
HI 17 Hydrogen Iodide Kalrez 24.7 29.7 25.1 29.7 3 5 6 15 16 46 47 141
F2 18 Fluorine - 24.7 29.7 25.1 29.7 3 9 10 27 28 83 84 254
Cl2 19 Chlorine Viton 24.7 29.7 25.1 29.7 3 6 7 19 20 57 58 173
H2S 22 Hydrogen Sulfide Kalrez 24.7 29.7 25.1 29.7 3 8 9 25 26 76 77 232
H2Se 23 Hydrogen Selenide Kalrez 24.7 29.7 25.1 29.7 3 7 8 22 23 66 67 202
CO2 25 Carbon Dioxide Buna 24.7 29.7 29.7 25.1 29.7 29.7 3 7 8 22 23 69 70 209
N2O 27 Nitrous Oxide Viton,Buna 24.7 29.7 29.7 25.1 29.7 29.7 3 7 8 21 22 65 66 200
CH4 28 Methane Viton,Buna 24.7 24.7 29.7 25.1 25.1 29.7 3 8 9 23 24 71 72 215
NH3 29 Ammonia Neoprene,EPDM 24.7 24.7 29.7 25.1 25.1 29.7 3 8 9 24 25 73 74 223
PH3 31 Phosphine Kalrez 19.7 24.7 21.3 25.1 3 7 8 22 23 67 68 205
SO2 32 Sulfur Dioxide EPDM 19.7 24.7 21.3 25.1 3 6 7 17 18 52 53 157
CH3F 33 Methyl Fluoride Viton 24.7 29.7 25.1 29.7 3 7 8 22 23 67 68 204
COS 34 Carbonyl Sulfide Viton 24.7 29.7 25.1 29.7 3 7 8 20 21 60 61 183
AsH3 35 Arsine Kalrez 24.7 29.7 25.1 29.7 3 6 7 18 19 55 56 170
ClCN 37 Cyanogen Chloride Kalrez 14.7 21.7 18.4 22.7 3 5 6 15 16 46 47 142
C2H4 38 Ethylene Viton 24.7 29.7 25.1 29.7 3 6 7 17 18 54 55 163
SiH4 39 Silane Kalrez 24.7 29.7 25.1 29.7 3 6 7 18 19 56 57 170
C2H2 42 Acetylene Viton 16.7 19.7 19.4 21.3 3 6 7 18 19 57 58 170
GeH4 43 Germane - 24.7 29.7 25.1 29.7 3 6 7 17 18 53 54 161
COF2 46 Carbonyl Fluoride Viton 19.7 19.7 21.7 21.3 21.3 22.7 3 5 6 17 18 53 54 160
BF3 48 Boron Trifluoride Kalrez 19.7 24.7 21.3 25.1 3 5 6 16 17 50 51 150
CHF3 49 Fluoroform (Freon-23) Viton,Kalrez 24.7 24.7 26.7 25.1 25.1 26.8 3 5 6 16 17 48 49 145
NF3 53 Nitrogen Trifluoride Teflon 24.7 29.7 26.7 25.1 29.7 26.8 3 5 6 15 16 46 47 140
B2H6 58 Diborane Kalrez 19.7 19.7 21.3 21.3 3 4 5 12 13 38 39 116
COCl2 60 Phosgene Kalrez 12.7 14.7 17.4 18.4 3 3 4 11 12 35 36 106
PF3 62 Phosphorus Trifluoride - 19.7 24.7 21.3 25.1 3 4 5 14 15 42 43 129
CF4 63 Carbon Tetrafluoride (Freon-14) Viton 24.7 24.7 26.7 25.1 25.1 26.8 3 4 5 13 14 40 41 121
SiH2Cl2 67 Dichlorosilane Kalrez 14.7 19.7 18.4 21.3 3 3 4 10 11 29 30 89
C3H6-b) 69 Propylene Viton 19.7 19.7 21.3 21.3 3 4 5 12 13 36 37 110
BCl3 70 Boron Trichloride Kalrez 11.7 14.7 17.0 18.4 3 3 4 10 11 31 32 94
ClO3F 72 Perchloryl Fluoride - 14.7 20.7 18.4 22.0 3 4 5 12 13 38 39 114
ClF3 77 Chlorine Trifluoride Kalrez 14.7 20.7 18.4 22.0 3 4 5 11 12 35 36 107
C2H7N 85 Dimethylamine Viton,Kalrez 9.7 14.7 16.3 18.4 3 3 4 11 12 34 35 101
SiF4 88 Silicon Tetrafluoride - 19.7 24.7 21.3 25.1 3 4 5 11 12 34 35 103
C3H8 89 Propane Viton 9.7 11.7 16.3 17.0 3 3 4 10 11 32 33 100
C2F4 94 Tetrafluoroethylene Viton,Buna 19.7 19.7 21.3 21.3 3 3 4 10 11 31 32 100
Si2H6 97 DISILANE - 19.7 19.7 21.3 21.3 3 3 4 10 11 30 31 92
GeF4 99 Germanium Tetrafluoride - 20.7 24.7 22.0 25.1 3 3 4 10 11 30 31 92
For reference only, consult factory on the latest tables.