Brooks Instrument GF81 - Manual (Page 6)

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Brooks ® GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013
Contents
Appendix A: GF40/GF80 Series Gas Table ............................................................................................. A-1
Appendix B: GF40/GF80/GF81 Series Patents ...................................................................................... B-1
Appendix C: Essential Instructions ....................................................................................................... C-1
Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover
Figure Page
Number Number
1-1 GF40/GF80/GF81 Series Digital Thermal Mass Flow Devices ....................................................... 1-1
1-2 Dimensions - GF40 Series ........................................................................................................... 1-11
1-3 Dimensions - GF80 Series ........................................................................................................... 1-12
1-4 Dimensions - GF81 Series, RS485/Analog & Profibus ................................................................. 1-13
1-5 Dimensions - GF81 Series, DeviceNet ......................................................................................... 1-14
2-1 Typical Gas Supply Arrangement ................................................................................................... 2-4
2-2 GF80 Series Mounted to K1 Series Substrate Blocks .................................................................... 2-7
2-3 Mounting Screws Torque Pattern ................................................................................................... 2-7
2-4 Zero Button Accessible at Top of Device ....................................................................................... 2-9
2-5 MultiFlo Cable Adapter .................................................................................................................. 2-10
2-6 RS-232/RS-485 Converter (P/N A33231) ..................................................................................... 2-11
2-7 Diagnostic Port ............................................................................................................................. 2-12
2-8 GF40/GF80/GF81 Series DeviceNet Connection and Pin-Outs .................................................... 2-12
2-9 GF40/GF80/GF81 Series with 15-Pin Analog Connector and Pin-Outs ........................................ 2-13
2-10 GF40/GF80/GF81 Series Profibus Connections and Pin-Outs ..................................................... 2-14
2-11 GF40/GF80/GF81 Series EtherCAT Connections and Pin-Outs ................................................... 2-14
2-12 Alarm Output Schematic ............................................................................................................... 2-15
3-1 GF40/GF80/GF81 Series Operating Principles .............................................................................. 3-2
Table Page
Number Number
1-1 Industry Standard References ....................................................................................................... 1-3
1-2 Terms and Acronyms ..................................................................................................................... 1-4
1-3 Specifications for Standard GF40/GF80 Series ............................................................................. 1-8
1-4 Specifications for Standard GF81 Series ...................................................................................... 1-9
1-5 Electrical Specifications for GF40/GF80/GF81 Series ................................................................. 1-10
2-1 K1 Substrate Torque Data .............................................................................................................. 2-7
2-2 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent ..................................................... 2-10
4-1 Environmental Factors ................................................................................................................... 4-3
4-2 GF40/GF80/GF81 Series Troubleshooting Guide .......................................................................... 4-4
5-1 GF40/GF80 Series Product Description Code Table ..................................................................... 5-1
5-2 GF81 Series Product Description Code Table ............................................................................... 5-3
A-1 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA40 to SA43 .................................................. A-1
A-2 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA40 to SA43 .......................................... A-2
A-3 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA44 to SA50 .................................................. A-3
A-4 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA44 to SA50 .......................................... A-4
B-1 GF40/GF80/GF81 Series Patents .................................................................................................. B-1