Brooks Instrument GF81 - Manual (Page 21)

2-1
Brooks ® GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013 Section 2 Installation
2-1 General
This section provides installation instructions for the Brooks GF40/GF80/
GF81 Series Thermal Mass Flow Devices. The installation process consists
of purging the gas supply line prior to installation, unpacking and inspecting
the device, connecting the device to the gas supply line and testing for
leaks.
2-2 Receipt of Equipment
When the instrument is received, the outside packing case should be checked
for damage incurred during shipment. If the packing case is damaged, the local
carrier should be notified at once regarding their liability. A report should be
submitted to your nearest Product Service Department.
Americas: Asia, Japan:
Brooks Instrument Brooks Instrument
407 W. Vine Street 1-4-4 Kitsuna, Koto-ku
P.O. Box 903 Tokyo 136-0073
Hatfield, PA 19440 USA Japan
Toll Free (888) 554 FLOW (3569) Tel 81 (3) 5633-7104
Tel (215) 362 3700
Fax (215) 362 3745 Brooks Instrument Korea, Ltd.
E-mail: [email protected] D-406 Bundang Techno Park 151
www.BrooksInstrument.com Sungnam, Kyungki-do, 463-070
Korea
Europe, Middle East, Africa: Tel +82 31 708 2522
Brooks Instrument B.V.
Neonstraat 3, P.O. Box 428 Brooks Instrument (Shanghai) Co. LTD
6710 BX Ede RM 203, Bldg 6
Netherlands NO 1888 Xin Jin Qiao Rd
Tel +31 (0) 318 549292 or Jinqiao E.P.Z. Pudong
+31 (0) 318 549291 Shanghai 201206
E-mail: service.coordinator@Brooks Instrument.com China
Tel 86-21-3895-4788
Brooks Instrument GmbH
Zur Wetterwarte 50 Haus 377/B,
01109 Dresden
Germany
Tel +49 (0) 351 215 20 442
E-mail: service.coordinatorDD@Brooks Instrument.com
In case you need technical assistance:
USA 888 275 8946 Korea +82 31 708 2521
Netherlands +31 (0) 318 549290 Taiwan +886 3 5590 988
Germany +49 351 215 2040 China +86 21 5079 8828
Japan +81 3 5633 7100 Singapore +6297 9741