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Brooks – Brooks Instrument GF81 User Manual

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Brooks

®

GF40/GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Section 1 Introduction

778Z011ZZZ

Basic MultiFlo Configurator Kit w/Power Supply and

Adapter Cables *Software, MultiFlo Configurator

A331710003

Cable Assembly 2.5 mm

A332300001

Converter 232/485

A332295001

Power Supply MFC

A332297002

Cable, Power, 9-Pin

A332297001

Cable, Power, DeviceNet

* MultiFlo Configurator Software is available on the Brooks Instrument
website at: www.BrooksInstrument.com/MultiFlo

www.BrooksInstrument.com/Documentation&Downloads

Advanced Thermal Measurement Sensor

Brooks high-performance thermal flow sensor brings together key design
elements to deliver the accurate, repeatable measurement under
challenging process conditions:

Improved accuracy at elevated temperatures through isothermal
packaging and ambient temperature sensing and compensation

Enhanced signal-to-noise performance enables improved low setpoint
accuracy

A large bore, corrosion resistant, Hastelloy

®

C-22 sensor tube ensures

long life and reliability

Optimized temperature profile for gases prone to thermal decomposi-
tion

Onboard electronics store sensor calibration data for ease of service

Extensive Mechanical Configurations

GF40

GF80

1/4'' VCR

9/16'' - 18 UNF

1-1/8'' C Seal 92 mm

1/8'' tube compression

1/4'' tube compression

3/8'' tube compression

1/2'' tube compression

6-mm tube compression

10-mm tube compression

1/4'' RC

1/4'' VCO

1/4'' NPT

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