Brooks – Brooks Instrument GF81 User Manual
Page 12
1-6
Brooks
®
GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013
Section 1 Introduction
778Z011ZZZ
Basic MultiFlo Configurator Kit w/Power Supply and
Adapter Cables *Software, MultiFlo Configurator
A331710003
Cable Assembly 2.5 mm
A332300001
Converter 232/485
A332295001
Power Supply MFC
A332297002
Cable, Power, 9-Pin
A332297001
Cable, Power, DeviceNet
* MultiFlo Configurator Software is available on the Brooks Instrument
website at: www.BrooksInstrument.com/MultiFlo
www.BrooksInstrument.com/Documentation&Downloads
Advanced Thermal Measurement Sensor
Brooks high-performance thermal flow sensor brings together key design
elements to deliver the accurate, repeatable measurement under
challenging process conditions:
•
Improved accuracy at elevated temperatures through isothermal
packaging and ambient temperature sensing and compensation
•
Enhanced signal-to-noise performance enables improved low setpoint
accuracy
•
A large bore, corrosion resistant, Hastelloy
®
C-22 sensor tube ensures
long life and reliability
•
Optimized temperature profile for gases prone to thermal decomposi-
tion
•
Onboard electronics store sensor calibration data for ease of service
Extensive Mechanical Configurations
GF40
GF80
1/4'' VCR
9/16'' - 18 UNF
1-1/8'' C Seal 92 mm
1/8'' tube compression
1/4'' tube compression
3/8'' tube compression
1/2'' tube compression
6-mm tube compression
10-mm tube compression
1/4'' RC
1/4'' VCO
1/4'' NPT