Brooks, Appendix a: gf40/gf80 series gas table – Brooks Instrument GF81 User Manual
Page 52
A-2
Brooks
®
GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013
Appendix A: GF40/GF80 Series Gas Table
Table A-2 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA40 to SA43
Min inlet pressure for
vac. exhaust (PSIA)
Min inlet pressure for
atm. exhaust (PSIA)
SA40
SA41
SA42
SA43
Gas Symbol
Gas
Code
Gas Name
Elastomer seal GF040
SA40-
SA47
SA48
SA50
SA40-
SA47
SA48
SA50
Low
High
Low
High
Low
High
Low
High
SiCl4
108
Silicon Tetrachloride
Kalrez
8.7
16.0
0
0
3
6
7
18
19
56
C3H9N
109
Trimethylamine
Kalrez
6.7
8.7
15.5
16.0
0 0 3 8 9 25 26
78
SF6
110
Sulfur
Hexafluoride
Viton,EPDM
19.7
19.7
20.7
21.3
21.3
22.0
0 0 3 8 9 25 26
77
C2F6
118
Hexafluoroethane (Freon-116)
Viton,Buna
19.7
19.7
21.3
21.3
0
0
3
8
9
23
24
71
WF6
121
Tungsten Hexafluoride
-
9.7
11.7
16.3
17.0
0
0
3
5
6
16
17
50
C3F8
128
Perfluoropropane
Viton
19.7
19.7
21.3
21.3
0 0 3 5 6 16 17
50
C4F8
129
Octafluorocyclobutane
Viton
19.7
19.7
21.3
21.3
0 0 3 5 6 16 17
50
C3F6
138
Hexafluoropropylene
Viton,Buna
19.7
19.7
21.3
21.3
0 0 3 6 7 20 21
60
C2HF5
155
PENTAFLUOROETHANE (FREON-125)
Viton
19.7
19.7
21.3
21.3
0
0
3
8
9
25
26
77
CH2F2
160
Difluoromethane
Viton
24.7
29.7
25.1
29.7
3
6
7
19
20
57
58
174
CH6Si
185
Methylsilane (MONO)
-
9.7
14.7
16.3
18.4
3
4
5
12
13
37
38
111
(CH3)3SiH
190
Trimethylsilane (TMSi)
-
6.7
15.5
0
0
3
7
8
20
21
62
C5F8
266
Octafluorocyclopentene
-
9.7
14.7
16.3
18.4
0 0 3 5 6 14 15
44
C4F6
270
Hexafluoro-2-butyne
-
9.7
16.3
0
0
3
6
7
19
20
57
C4F6-q)
297
Hexafluoro Butadiene-1-3
-
14.7
14.7
18.4
18.4
0
0
3
6
7
17
18
52
C5F8O
354
Epoxyperfluorocyclopentene
-
19.7
19.7
21.3
21.3
0 0 3 4 5 13 14
40
Si3H9N
368
Trisilylamine (TSA)
-
6.0
7.2
15.3
15.6
0
0
3
6
7
20
21
60
10%GeH4/H2
509
10%Germane/Hydrogen
MIX-Check components
20.7
20.7
22.0
22.0
3
9
10
28
29
86
87
260
10%PH3/H2
516
10%Phosphine/Hydrogen
MIX-Check components
14.7
14.7
18.4
18.4
3
9
10
28
29
90
91
275
4.5%PH3/N2
528
4.5%Phosphine/Nitrogen
MIX-Check components
20.7
29.7
22.0
29.7
3
10
11
30
31
94
95
280
20%O2/He
536
20%Oxygen/Helium
MIX-Check components
19.7
29.7
21.3
29.7
4
13
14
38
39
120
121
360
5%H2/N2
542
5%Hydrogen/Nitrogen
MIX-Check components
24.7
29.7
25.1
29.7
3
10
11
30
31
92
93
280
1%B2H6/H2
557
1%Diborane Hydrogen
MIX-Check components
24.7
29.7
25.1
29.7
3
10
11
30
31
91
92
270
1%PH3/H2
563
1%Phosphine/Hydrogen
MIX-Check components
19.7
19.7
21.3
21.3
3
10
11
30
31
90
91
273
3%B2H6/N2
595
3%Diborane/Nitrogen
MIX-Check components
20.7
29.7
22.0
29.7
3
9
10
29
30
90
91
270
3%H2/N2
597
3%Hydrogen/Nitrogen
MIX-Check components
24.7
29.7
25.1
29.7
3
10
11
30
31
92
93
280
30%He/O2
603
30%Helium/Oxygen
MIX-Check components
24.7
29.7
25.1
29.7
4
11
12
33
34
100
101
301
30%O2/He
604
30%Oxygen/Helium
MIX-Check components
19.7
29.7
21.3
29.7
4
12
13
37
38
113
114
345
4%H2/He
606
4%Hydrogen/Helium
MIX-Check components
19.7
19.7
21.3
21.3
5
14
15
41
42
126
127
400
4%H2/N2
607
4%Hydrogen/Nitrogen
MIX-Check components
24.7
29.7
25.1
29.7
3
10
11
30
31
92
93
280
5%B2H6/Ar
615
5%Diborane/Argon
MIX-Check components
24.7
25.1
4
12
13
38
39
116
117
353
50%PH3/SiH4
632
50%Phosphine/Silane
MIX-Check components
16.7
24.7
19.4
25.1
3
6
7
20
21
62
63
190
10%O2/He
649
10%Oxygen/Helium
MIX-Check components
19.7
24.7
21.3
25.1
5
13
14
41
42
123
124
380
2%SiH4/N2
653
2%SILANE/NITROGEN
MIX-Check components
19.7
24.7
21.3
25.1
3
10
11
30
31
93
94
280
5%B2H6/N2
654
5%Diborane/Nitrogen
MIX-Check components
24.7
29.7
25.1
29.7
3
9
10
28
29
86
87
262
.8%B2H6/N2
662
.8%Diborane/Nitrogen
MIX-Check components
24.7
29.7
25.1
29.7
3
10
11
30
31
93
94
280
10%PH3/He
674
10%Phosphine/Helium
MIX-Check components
14.7
19.7
18.4
21.3
4
13
14
40
41
120
121
370
2%B2H6/N2
695
2%Diborane/Nitrogen
MIX-Check components
24.7
29.7
25.1
29.7
3
10
11
30
31
93
94
280
10%GeH4/Ar
698
10%Germane/Argon
MIX-Check components
24.7
29.7
25.1
29.7
4
12
13
38
39
114
115
350
5%H2/He
762
5%Hydrogen/Helium
MIX-Check components
19.7
19.7
21.3
21.3
5
14
15
41
42
125
126
400
5%B2H6/He
766
5%Diborane/Helium
MIX-Check components
14.7
16.7
18.4
19.4
4
12
13
38
39
115
116
350
15%B2H6/H2
820
15%Diborane/Hydrogen
MIX-Check components
14.7
14.7
18.4
18.4
3
8
9
25
26
76
77
230
3%C2H4/He
878
3%Ethylene/Helium
MIX-Check components
19.7
19.7
21.3
21.3
4
13
14
40
41
125
126
375
10%B2H6/Ar
881
5%Diborane/Argon
MIX-Check components
24.7
29.7
25.1
29.7
4
11
12
35
36
105
106
320
2.7%C2H4/He
897
2.7%Ethylene/Helium
MIX-Check components
19.7
19.7
21.3
21.3
4
13
14
40
41
125
126
377
1%GeH4/H2
898
1%Germane/Hydrogen
MIX-Check components
20.7
20.7
22.0
22.0
3
10
11
30
31
91
92
275
.5%GeH4/H2
910
0.5%Germane/Hydrogen
MIX-Check components
20.7
20.7
22.0
22.0
3
10
11
30
31
92
93
280
2%PH3/H2
916
2%Phosphine/Hydrogen
MIX-Check components
21.7
21.7
22.7
22.7
3
10
11
30
31
91
92
275
3.9%H2/N2
930
3.9%Hydrogen/Nitrogen
MIX-Check components
24.7
29.7
25.1
29.7
3
10
11
30
31
92
93
280
10%B2H6/He
939
10%Diborane/Helium
MIX-Check components
19.7
19.7
21.3
21.3
4
11
12
34
35
103
104
314
30%C2H4/He
946
30%Ethylene/Helium
MIX-Check components
19.7
24.7
21.3
25.1
3
10
11
30
31
90
91
275
10%H2/He
950
10%Hydrogen/Helium
MIX-Check components
19.7
19.7
21.3
21.3
4
13
14
40
41
125
126
380
15%H2/B2H6
953
15%Hydrogen/Diborane
MIX-Check components
19.7
19.7
21.3
21.3
3
4
5
14
15
42
43
130
17%CH4/CO2
958
17%Methane/Carbon Dioxide
MIX-Check components
24.7
29.7
25.1
29.7
3
7
8
23
24
70
71
210
20%CH6Si/H2
962
20%Methylsilane (MONO)/Hydrogen
MIX-Check components
14.7
19.7
18.4
21.3
3
7
8
23
24
71
72
212
50%CH3SiHCl2/H2
965
50%Dichloromethylsilane/Hydrogen
MIX-Check components
11.7
13.7
17.0
17.9
3
4
5
14
15
42
43
130
20%GeH4/H2
978
20%Germane/Hydrogen
MIX-Check components
19.7
24.7
21.3
25.1
3
8
9
26
27
81
82
241
0.5%B2H6/He
979
0.5%Diborane/Helium
MIX-Check components
14.7
19.7
18.4
21.3
5
14
15
42
43
130
131
400
COS-Special
5022
Carbonyl Sulfide (Special)
-
24.7
29.7
25.1
29.7
3
7
8
20
21
60
61
183
For reference only, consult factory on the latest tables.