Brooks Instrument 5850EM - Manual (Page 9)

1-3
Brooks ® Models 5964, 5850EM
Section 1 Introduction Installation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
Differential Pressure
Valve orifice sized for any pressure drop between 5 to 50 psi (Minimum
pressure drop depends on gas and range).
Ambient Temperature Limits
Operating: 40°F to 150°F (5°C to 65°C)
Non-Operating: -13°F to 212°F (-25°C to 100°C)
Leak Integrity
Inboard to outboard 1 x 10
-10 atm. cc/sec. Helium max.
PHYSICAL CHARACTERISTICS:
Materials of Construction
316L VAR (Vacuum Arc Remelt), 316L, and high alloy ferritic stainless
steel.
External seals: Nickel.
Internal seals: Nickel.
Valve Seat: 316L, Viton ® fluoroelastomers, Buna-N, Kalrez ® or Teflon ® .
Dimensions
Refer to Figures 1-1 thru 1-4
Process Connections
1/4" Tube VCR
TM
Downport C-Seal
Downport W-Seal
Surface Finish
5850EM: 32Ra, Passivated
5964: 7Ra, Electropolished
ELECTRICAL CHARACTERISTICS:
Electrical Connections
Card Edge: 30 microinch gold over low stress nickel-plated copper
D-Connector: 15 Pin (DA-15P)
Command Input
Voltage Option: 0-5 Vdc (Input resistance 40 k ohm min.)
Current Option: 4-20 mAdc (Input resistance 75 ohm)
Output Signal
Voltage Option: 0 to 5 Vdc into 2,000 ohms minimum
Current Option: Jumper selectable 4-20 mAdc or 0-20 mAdc, refer to
Figure 2-6 for maximum total loop resistance