Brooks Instrument 5850EM - Manual (Page 7)

1-1
Brooks ® Models 5964, 5850EM
Section 1 Introduction Installation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
1-1 How to Use This Manual
This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the
Brooks
® Models 5964 and 5850EM
This manual is organized into the following sections:
Section 1. Introduction
Section 2. Installation
Section 3. Operation
Section 4. Maintenance
Section A CE Certifications
Back Cover Warranty, Local Sales/Service Contact Information
1-2 Description
The Brooks Models 5964 and 5850EM Mass Flow Controllers is used in
gas flow handling systems where very low leakage and high performance
are required. The Models 5964 and 5850EM incorporates metal seals or
welded joints, insuring leak integrity for high purity and high vacuum
applications. Reducing the amount of internal threads makes the design
less prone to system contamination. The control electronics and flow
sensor designs utilized in the Models 5964 and 5850EM have been well-
proven in precision gas delivery systems. Standard features include:
• High leak integrity (less than 10 -10 atm-cc/sec He)
• Enhanced process (7 Ra) internal surface finish (Optional 5850EM)
• Electropolished wetted surfaces (Optional 5850EM)
• High purity VAR 316L Stainless Steel
• All metal seals
• Particulate free
• Wide flow range (0.06 sccm through 30,000 sccm)
• Insensitive to mounting attitude
• Negligible flow overshoot/undershoot
• Fast response control permits rapid gas settling times with minimal
over/undershoot. Refer to Figure 1-1.
• Helium leak check ports
• Class 100 Clean Room assembly and calibration (Optional 5850EM)
• Available with all popular process connections