Brooks – Brooks Instrument 5850EM User Manual
Page 26
3-2
Brooks
®
Models 5964, 5850EM
Section 3 Operation
Installation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
Figure 3-1 Model 5964/5850EM Components
Electronics Cover
Valve Coil
Assembly
Valve Connector
Outlet
Connector
Electrical
Interface
Inlet
Connector
Adjustment
Potentiometers
Tubing Connections
Electronics Cover
Valve Coil
Assembly
Valve Connector
Electrical
Interface
Adjustment
Potentiometers
Mounting
Fastener Bore
Downported
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