Brooks Instrument 5850EM - Manual (Page 6)

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Brooks ® Models 5964, 5850EM
Contents Installation and Operation Manual
X -TMF-5964-5850EM-MFC-eng
Part Number:541B121AHG
November, 2008
Figures
Figure Page
Number Number
1-1 MFC/MFM Dimensional Drawing for Model 5964/5850EM
with D-Connector and VCR Fittings ........................................................................................ 1-5
1-2 MFC/MFM Dimensional Drawing for Model 5964/5850EM
with Card Edge and VCR Fittings ............................................................................................ 1-6
1-3 MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with D-Connector .... 1-7
1-4 MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with Card Edge ....... 1-8
2-1 Card Edge Connector ............................................................................................................. 2-6
2-2 20 Pin Card Edge Connector Ribbon Cable Hookup Diagram ................................................ 2-7
2-3 D-Connector Shielded Cable Hookup Diagram - Voltage I/O Version ..................................... 2-6
2-4 D-Connector Shielded Cable Hookup Diagram - Current I/O Version ..................................... 2-8
2-5 Maximum Allowable Loop Resistance-Current I/O version ..................................................... 2-8
2-6 Common Electrical Hookups Current I/O version ................................................................... 2-9
3-1 Model 5964/5850EM Components .......................................................................................... 3-2
3-2 Externaslly Accessible Adjustments ........................................................................................ 3-3
3-3 Flow Sensor Operational Diagram (VCR TM End Connections Shown) .................................... 3-4
3-4 Flow Controller System Block Diagram ................................................................................... 3-4
3-5 Enhanced Response 20 Pin Card Edge PC Board Jumper location and Function ................. 3-6
3-6 Standard Response 20 Pin D-Connector PC Board Jumper location and Function ................ 3-7
3-7 Enhanced Response 15 Pin D-Connector PC Board Jumper location and Function .............. 3-8
3-8 Standard Response 15 Pin D-Connector PC Board Jumper location and Function ................ 3-9
3-9 Current I/O Version PC Board Jumper Location and Function .............................................. 3-10
3-10 Command Steps, Soft Start Disabled .................................................................................... 3-11
3-11 100% Command Steps, Soft Start Enabled ........................................................................... 3-11
3-12 Adjustment Potentiometer Location ...................................................................................... 3-14
3-13 Bench Troubleshooting Circuit .............................................................................................. 3-16
3-14 Response Adjustment ........................................................................................................... 3-22
4-1 Model 5964/5850EM Orifice Sizing Nomograph ................................................................... 4-11
4-2 Example Nomograph ............................................................................................................ 4-14
Tables
Table Page
Number Number
2-1 Recommended Filter Size .......................................................................................................... 2-3
3-1 Cables, calibration Covers and PC Boards for Model 5964/5850EM ......................................... 3-3
4-1 Bench Troubleshooting .............................................................................................................. 4-4
4-2 Sensor Troubleshooting ............................................................................................................. 4-5
4-3 Conversion Factors (Nitrogen Base) .......................................................................................... 4-7
4-4 Model 5964/5850EM Standard Restrictors ................................................................................ 4-16