Brooks Instrument 5850EM - Manual (Page 5)

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Brooks ® Models 5964, 5850EM
Contents Installation and Operation Manual
X -TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
Paragraph Page
Number Number
Section 1 Introduction
1-1 How to Use This Manual ............................................................................................................ 1-1
1-2 Description ................................................................................................................................. 1-1
1-3 Specifications ............................................................................................................................. 1-2
Section 2 Installation
2-1 General ...................................................................................................................................... 2-1
2-2 Receipt of Equipment ................................................................................................................. 2-1
2-3 Recommended Storage Practice ............................................................................................... 2-1
2-4 Return Shipment ........................................................................................................................ 2-2
2-5 Transit Precaution ...................................................................................................................... 2-2
2-6 Removal from Storage ............................................................................................................... 2-2
2-7 In-Line Filter ............................................................................................................................... 2-3
2-8 Installation .................................................................................................................................. 2-3
2-9 Electrical Interface ...................................................................................................................... 2-4
2-10 Operation Procedure .................................................................................................................. 2-5
Section 3 Operation
3-1 Overview .................................................................................................................................... 3-1
3-2 Connections and Controls .......................................................................................................... 3-1
3-3 Theory of Operation ................................................................................................................... 3-4
3-4 Features ..................................................................................................................................... 3-6
3-5 Adjustment Potentiometers ....................................................................................................... 3-15
3-6 Zero Adjustment ........................................................................................................................ 3-16
3-7 Calibration Procedure ............................................................................................................... 3-17
3-8 Response Adjustment ............................................................................................................... 3-22
Section 4 Maintenance
4-1 Overview .................................................................................................................................... 4-1
4-2 Troubleshooting .......................................................................................................................... 4-2
4-3 Gas Conversion Factors ............................................................................................................ 4-6
4-4 Orifice Sizing ............................................................................................................................. 4-10
4-5 Restrictor Sizing ........................................................................................................................ 4-15
Section A CE Certificate
CE Certificate of Mass Flow Equipment ................................................................................................ A-1
Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover