Brooks Instrument 5850EM - Manual (Page 8)

1-2
Brooks ® Models 5964, 5850EM
Section 1 Introduction Installation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
1-3 Specifications
PERFORMANCE CHARACTERISTICS:
Flow Ranges*
Any range from 0 - 3 sccm to 0 - 30,000 sccm Nitrogen equivalent. Lower
flows available, consult factory.
*Standard: 0°C and 101 kPa (760 Torr). Per SEMI Guideline E12-96.
Control Range
2 - 100% with elastomeric valve seat
3 - 100% with metal or Teflon
® valve seat
Accuracy
1% Full Scale including linearity, at calibration conditions
1.5% Full Scale including linearity, for flow ranges greater than 20 slpm
Repeatability
0.25% of rate
Settling Time
Model 5964: Enhanced response PCB's less than 1 sec to within 2% of
Full Scale of final value for a 0-100% command step with Normally Closed
Valve. (Optional on 5850EM).
Model 5850EM: Less than 3 seconds to within 2% of Full Scale of final
value for a 0-100% command step with Normally Closed Valve.*
*Per SEMI Guideline E17-91.
Mounting Attitude Sensitivity
Available in any position
0.5% maximum full scale deviation after rezeroing
Temperature Sensitivity
Zero: Less than ±0.075% full scale per °C
Span: Less than ±1.0% full scale shift over 10-50°C range
Pressure Equipment Directive (PED) 97/23/EC
Sound Engineering Practice
Pressure Sensitivity
0.008% per psi Nitrogen
RATINGS:
Operating Pressure
1,500 psi (10.342 MPa) max.
Note: 150 psi for enhanced response
500 psi for stainless steel fasteners option.