Brooks – Brooks Instrument 5850EM User Manual
Page 55

4-5
Brooks
®
Models 5964, 5850EM
Section 4 Maintenance
Installation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
Table 4-2 Sensor Troubleshooting
Remove the sensor connector from the PC Board for this procedure.
OHMMETER CONNECTION
RESULT IF ELECTRICALLY FUNCTIONAL
Open circuit on ohmmeter. If either heater (1) or
Pin 1 or 4 to meter body
sensor common (4) are shorted, an ohmmeter
reading will be obtained.
Pin 4 to Pin 2
Nominal 1100 ohms reading, depending on
Pin 4 to Pin 3
Pin 5 to Pin 1
Nominal 1200 ohm reading.
temperature and ohmmeter current.
SENSOR
SCHEMATIC
PIN
NO.
FUNCTION
1
Heater
Upstream
2
Temperature
Sensor (Su)
Downstream
3
Temperature
Sensor (Sd)
4
Sensor Common
5
Heater Common
See also other documents in the category Brooks Instrument Hardware:
- QMBC (52 pages)
- SolidSense II (28 pages)
- SLA7810/20 (36 pages)
- SLA5810/20 (50 pages)
- SLA5840 (46 pages)
- SLA7840 (40 pages)
- 5866E (65 pages)
- IPS122 2 Indicating Pressure Switches" (18 pages)
- IPT122 2 Indicating Pressure Transmitters" (22 pages)
- 8601 (20 pages)
- PTI Metal Seal Mass Flow Controller w/Real-Time Flow Error Detection & Advanced Diagnostics (82 pages)
- SLA5800 Series (76 pages)
- 5800S Series (50 pages)
- 4800 Series (50 pages)
- 5851EM (62 pages)
- 5850E (64 pages)
- 5851E (64 pages)
- 5860E (46 pages)
- 5861E (44 pages)
- 5850i (62 pages)
- 5851i (62 pages)
- 5860i (48 pages)
- 5861i (48 pages)
- 5881/91 (40 pages)
- GF40 (78 pages)
- SLAMf Series (76 pages)
- Mfi Series (82 pages)
- 0254 (124 pages)
- 0260 (14 pages)
- CMC Series (36 pages)
- XacTorr CMX45 (64 pages)
- MT3809G (78 pages)
- MT3809E (72 pages)
- MT3810 (66 pages)
- 3600 Series (56 pages)
- 3750 (64 pages)
- Control Valve (16 pages)
- GT1000 (52 pages)
- 1100 Series (52 pages)
- 1307 (18 pages)
- 1358 (44 pages)
- 1350 (46 pages)
- 1250 (2 pages)
- FC8800 Series (48 pages)