Brooks Instrument 5850E - Manual (Page 9)

1-3
Section 1 Introduction
Brooks ® Model 5850E
Installation and Operation Manual
X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009
Valve Off accessed via terminal J on the Card Edge or Pin 4 on the D-
Connector version. This feature allows the user to close the control
valve independently of the command signal by supplying a TTL level
low signal to the proper terminal. This function is useful when
performing repetitive flow operations or as a safety shutdown.
(Refer to Section 2-11.)
Valve Test Point/Purge accessed via terminal D on the Card Edge or Pin
7 on the D-Connector version. This feature allows the user to monitor
the control valve voltage during operation. Shorting the valve test point
pin to power supply common will cause the valve to open regardless of
command input voltage. (Refer to Section 2-10.)
Remote Transducer Input accessed via Terminal 5 on the Card Edge or
Pin 15 on the D-connector version. This feature allows the use of the
integral control electronics and valve to regulate flow in response to the
signal from an external 0-5 Vdc signal. The mass flow signal from the
Model 5850E is still available for process monitoring.
(Refer to Section 2-9.)
1-3 Specifications
Standard Ranges:
3 sccm to 30 slpm* (Nitrogen equivalent)
*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials International) standard: 0°C
and 101.3 kPa (760 Torr).
Accuracy:
±1% full scale including linearity at calibration conditions.
±1.5% full scale including linearity for flow ranges greater than 20 slpm.
Repeatability:
0.25% of rate
Response Time:
Less than 3 seconds response to within 2% of full scale final value with a 0
to 100% command step.
Power Requirements (NC Valve):
+15 Vdc ±5%, 35 mA
-15 Vdc ±5%, 180 mA
3.5 watts power consumption