Brooks, Model 5850e – Brooks Instrument 5850E User Manual
Page 55
4-23
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009
Brooks
®
Model 5850E
Table 4-5 Model 5850E Standard Restrictors
20
1.386
80
0.876
100
Mixture Factor =
= 0.945
+
Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen. In this example
a Size 4 Wire Mesh Assembly would be selected.
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