Brooks Instrument 5850E - Manual (Page 38)

4-6
Installation and Operation Manual
X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009
Section 4 Maitenance &
Troubleshooting
Brooks ® Model 5850E
4-3 Sensor Tube
The sensor tube is part of a calibrated flow divider that is designed to
operate within a preset gas flow range. The sensor assembly may be
removed or replaced by referring to Section 4-4, Disassembly and
Assembly. If the sensor assembly is cleaned and reinstalled, a calibration
check should be performed. Refer to Section 3-4.
4-4 Disassembly and Assembly
The Model 5850E Mass Flow Controller may be disassembled in the field
by the user for cleaning, re-ranging or servicing. Disassemble and
assemble the controller as follows: (for normally open valves N.O.)
Figures 3-3 and 3-4 show the location and function of jumpers. The
jumpers J4 and J1 (blue) must be in the position indicated for a normally
open valve.
Figure (labeled 4-2) showing the location and function of valve adjustment
spacers. Valve adjustment is not required for normal installation and
operation of the mass flow controller. If adjustment is required, consult the
factory for information.
Figure (labeled 5-1) showing an exploded view of the controller and
specific parts to the normally open N.O. valve.
Note: The Model 5850E Mass Flow Controller should be disassembled and
assembled in a clean environment to prevent particulate contamination.
A. Disassembly
The numbers in () refer to the spare parts exploded view in Figure 5-1.
1. Remove the jam nut (1) on top of the valve assembly.
2. Unplug the valve connector from the electronics cover and remove the
coil assembly (2).
3. Remove the hex socket screws (3) securing the valve retaining plate
(4) attaching the valve stem assembly (6)(NC valve - Normally Closed)
or (34) (NO Valve - Normally Open).
4. Carefully remove the valve stem assembly (6)(NC Valve) or
(34)(NO Valve).
5. Remove the plunger assembly (7,8,9,11)(NC Valve) or
(35,31,32,8,9,11)(NO Valve).