Brooks Instrument 5850E - Manual (Page 5)

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Contents
Brooks ® Model 5850E
Installation and Operation Manual
X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009
Section 1
Introduction
Paragraph
Number
Page
1-1 Purpose ............................................................................. 1-1
1-2 Description ........................................................................ 1-1
1-3 Specifications .................................................................... 1-3
Section 2
Installation
2-1 Receipt of Equipment ........................................................ 2-1
2-2 Recommended Storage Practice ...................................... 2-1
2-3 Return Shipment ............................................................... 2-2
2-4 Gas Connections ............................................................... 2-2
2-5 Installation ......................................................................... 2-3
2-6 In-Line Filter ...................................................................... 2-6
2-7 Soft Start ............................................................................ 2-7
2-8 Remote Setpoint (Command) Input ................................... 2-7
2-9 Valve Override ................................................................... 2-8
2-10 Remote Transducer Input .................................................. 2-8
2-11 Valve Test Point/Purge ...................................................... 2-8
2-12 Valve Off ............................................................................ 2-9
2-13 Five Volt Reference Output/Valve Drive Configuration ...... 2-9
Section 3
Operation
3-1 Theory of Operation .......................................................... 3-1
3-2 Operating Procedure ......................................................... 3-3
3-3 Zero Adjustment ................................................................ 3-3
3-4 Calibration Procedure ........................................................ 3-6
3-5 Response ......................................................................... 3-10
Section 4
Maintenance &
Troubleshooting
4-1 General ............................................................................. 4-1
4-2 Troubleshooting ................................................................. 4-2
4-3 Sensor Tube ...................................................................... 4-6
4-4 Disassembly and Assembly ............................................... 4-6
4-5 Gas Conversion Factors .................................................. 4-13
4-6 Orifice Sizing .................................................................... 4-17
4-7 Restrictor Sizing ............................................................... 4-21