Brooks Instrument 5850E - Manual (Page 37)

4-5
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009
Brooks ® Model 5850E
5. Deposits of silicon dioxide may be removed by soaking the internal
parts in solution of 5% hydrofluoric acid (5 parts hydrofluoric acid and
95 parts water (H
2
O)) followed by Freon TF.
6. Sintered type restrictor elements should be replaced as it is not pos-
sible to adequately remove deposits from them. Wire mesh and
A.C.L.F.E. type restrictor elements can be cleaned in an ultrasonic bath.
Refer to Section 4-7 for the correct restrictor to use.
7. Blow all parts dry with clean, dry Nitrogen and reassemble Refer to
Section 4-4b, (assembly).
8. Purge the assembled controller with clean, dry Nitrogen.
9. Perform the calibration procedure in Section 3-4.
10.When the controller is reinstalled in the system, the connections should
be leak-tested and the system purged with clean, dry Nitrogen for 30
minutes prior to start-up to prevent the formation of deposits.
Table 4-2 Sensor Troubleshooting