Brooks Instrument 5850E - Manual (Page 7)

1-1
Section 1 Introduction
Brooks ® Model 5850E
Installation and Operation Manual
X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009
1-1 Purpose
The Brooks ® Model 5850E Flow Controller is a mass flow measurement
device designed for accurately measuring and rapidly controlling flows of
gases. This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the Brooks 5850E
Mass Flow Controller. This manual is organized into five sections:
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance & Troubleshooting
Section 5 Replacement Parts
Back Cover Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5850E.
1-2 Description
The Brooks Model 5850E Mass Flow Controller is used widely in the
Semiconductor Industry as well as many others, where manual, electronic
or computer controlled gas handling occurs. The Model 5850E consists of
three basic units: a flow sensor, a control valve and an integral electronic
control system. This combination produces a stable gas flow, which
eliminates the need to continuously monitor and readjust gas pressures.
Standard features include:
Fast Response Control permits rapid gas settling times with little or no
over/undershoot. (Refer to Figure 1-1.)
Soft Start provides a flow ramping function which slows down the
introduction of the process gas for those processes which cannot
tolerate rapid flow transition. (Refer to Section 2-6 and Figure 1-2.)
Valve Override permits the user to fully open and close the control valve
independent of the command setting. (Refer to Section 2-8.)
Setpoint (Command) permits the user to program the mass flow controller
with an external 0-5 Vdc command potentiometer.
(Refer to Section 2-7.)
Low Command Valve Inhibit (Auto Shut-off) prevents the valve from
opening whenever the set-point is less than 2% of full scale.
Removable Cleanable Sensor permits the user to clean or replace the
sensor. (Refer to Section 4-4.)
Output Limiting prevents possible damage to delicate data acquisition
devices by limiting the output to +6.8 Vdc and -0.7 Vdc.