Brooks Instrument 5850E - Manual (Page 40)

4-8
Installation and Operation Manual
X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009
Section 4 Maitenance &
Troubleshooting
Brooks ® Model 5850E
Note: Do not attempt to disassemble the sensor assembly.
12.Remove the sensor assembly O-rings (17) from the flow controller body
(14). Using the Brooks O-ring removal tool will help prevent scratching
the sealing surface.
13.Remove the adapter fittings (27) from the flow controller body (14).
14.Remove the restrictor assembly (21) from the inlet side of the flow
controller body (14) using the restrictor tool (part of service tool kit listed
in Section 5, Table 5-2).
B. ASSEMBLY
Note: It is recommended that all O-rings be replaced during controller
assembly. All O-rings should be lightly lubricated with Halocarbon lubricant
(part of O-ring kit, Section 5) prior to their installation.
1. Examine all parts for signs of wear or damage, replace as necessary.
2. Place the restrictor O-ring (22) on the restrictor assembly. Screw the
restrictor assembly (21) into the inlet side of the flow controller body
using the restrictor tool, tighten hand tight.
3. Press the lubricated sensor O-rings (17) into the flow controller body
(14). Install the sensor assembly and secure with two screws (18) and
washers (19) tightened to 15 in/lbs.
4. Install the orifice (12) and its O-ring (13), using a 3/8 nut driver. Insure
that the orifice is fully seated but do not overtighten.
5. Insert the valve preload spacers (10)(NC Valve) or (33)(NO Valve), if
used, into the valve cavity in the flow controller body (14). Use care to
preserve the correct order.
6. Place the spacers (9) and spring (8) on the valve seat (11) in the same
order as noted in step 8 of the disassembly. Screw the valve seat (11)
into the plunger assembly (7)(NC Valve) or (35,31,32)(NO Valve).
Tighten the assembly until there is no looseness, but do not over-
tighten.
7. Install the valve plunger assembly (7, 8, 9 and 11)(NC Valve) or
(35,31,32,8,9,11)(NO Valve) on the preload spacers (10). Install air gap
spacers (10), if used on top of the valve spring.
8. Install the valve stem assembly (6), secure with the valve retaining plate
(4) and four hex socket screws (3). When installing the screws they
should first make light contact with the plate, which should be checked
to insure that it makes full contact around the stem assembly. Torque