Brooks Instrument 5850E - Manual (Page 6)

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Brooks ® Model 5850E
Installation and Operation Manual
X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009
Contents
Section 5
Parts List
5-1 General ............................................................................. 5-1
Section A
CE Certification
CE Certification of Mass Flow Equipment ................................... A-1
Warranty, Sales/Service Contact Information ...................... Back Cover
Figures
Figure
Number
Page
1-1 Command Steps, Soft Start Disabled ................................ 1-2
1-2 0-100% Command Step, Soft Start Enabled ..................... 1-2
2-1 Model 5850E Dimensions ................................................. 2-3
2-2 Model 5850E Card Edge Connector Comparison Guide ... 2-4
2-3 Model 5850E Card Edge Connector Hookup Diagram ...... 2-5
2-4 D-Type Connector Pin Arrangement ................................. 2-5
3-1 Flow Sensor Operational Diagram .................................... 3-2
3-2 Flow Control System Block Diagram ................................. 3-3
3-3 Card Edge PC Board Jumper Location & Function ........... 3-4
3-4 D-Connector PC Board Jumper Location & Function ........ 3-5
3-5 Model 5850E Calibration Connections .............................. 3-6
3-6 Adjustment Potentiometer Location .................................. 3-9
3-7 Fast Response Adjustment .............................................. 3-11
4-1 Torque Sequence for the Valve Retainer Plate .................. 4-7
4-2a Valve Adjusting Spacer Locations (N.C.) .......................... 4-11
4-2b Valve Adjusting Spacer Locations (N.O.) .......................... 4-12
4-3 Voltmeter Connections for Valve Adjustment ................... 4-14
4-4 Example Nomograph ....................................................... 4-18
5-1 Model 5850E Parts Drawing .............................................. 5-1
Tables
Table
Number
Page
2-1 Recommended Filter Size ................................................. 2-6
4-1 Bench Troubleshooting ...................................................... 4-4
4-2 Sensor Troubleshooting .................................................... 4-5
4-3 Conversion Factors (Nitrogen Base) ................................ 4-15
4-4 Model 5850E Orifice Sizing Nomograph .......................... 4-19
4-5 Model 5850E Standard Restrictors ................................... 4-23
5-1 Model 5850E Replacement Parts List ............................... 5-2
5-2 Tool and Spare Part Kits for 5850E Series ........................ 5-4