Brooks Instrument 5850E - Manual (Page 16)

Brooks ® Model 5850E
2-6
Installation and Operation Manual
X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009
Section 2 Installation
e. When installing controllers with full scale flow rates of 10 slpm or
greater, be aware that sharp, abrupt angles in the system piping directly
upstream of the controller may cause a small shift in accuracy. If
possible, have at least ten pipe diameters of straight tubing upstream of
the Model 5850E Mass Flow Controller.
Note: The control valve in the Model 5850E provides precision control
and is not designed for positive shut-off. If positive shut-off is required,
it is recommended that a separate shut-off valve be installed in-line.
2-6 In-Line Filter
It is recommended that an in-line filter be installed upstream from the
controller to prevent the possibility of any foreign material entering the flow
sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.
Table 2-1 Recommended Filter Size.
Maximum Flow Rate Recommended Filter Size
100 sccm 1 micron
500 sccm 2 micron
1 to 5 slpm 7 micron
10 to 30 slpm 15 micron
Note: The above lists the maximum recommended porosity for each flow
range. It is recommended that the minimum micron porosity that does not
limit the full scale flowrate be used.
Electrical Interfacing
To insure proper operation, the Model 5850E must be connected per
Figures 2-3 and 2-4, and configured according to Sections 2-6 to 2-13.
As a minimum the following connections must be made for new
installations:
Chassis Ground
0-5 Volt Signal Common
0-5 Volt Signal Output
+15 Vdc Supply
-15 Vdc Supply
Command Input
Command Common
Supply Voltage Common
Valve Return (Refer to Section 2-12 for jumper configuration)