Brooks Instrument 5850E - Manual (Page 10)

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Brooks ® Model 5850E
Installation and Operation Manual
X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009
Section 1 Introduction
Power Requirements (NO Valve):
+15 Vdc ±5%, 215 mA
-15 Vdc ±5%, 180 mA
11.85 watts power consumption
Ambient Temperature Limits:
Operating: 40°F to 150°F (5°C to 65°C)
Non-operating: -13°F to +212°F (-25°C to 100°C)
Working Pressure:
1500 psi (10.342 mPa) maximum
Differential Pressure:
5 to 50 psi (minimum pressure drop depends on gas and range). Refer to
Orifice Sizing, Section 4-6.
Output Signal:
0-5 Vdc into 2000 ohms or greater. Maximum ripple 3 mV.
5 Volt Reference Output:
5 Volts ±0.2%. Maximum load 1 k ohms.
Temperature Sensitivity:
Zero: less than ±0.075% F.S. per degree C.
Span: less than ±1.0% F.S. shift over 10-50°C range
Power Supply Sensitivity:
±0.09% full scale per % power supply voltage variation
Mounting Attitude Sensitivity:
±0.5% maximum full scale deviation after re-zeroing
Command Input:
0-5 Vdc. Input resistance 200 k ohm
Leak Integrity:
1 x 10
-9 Atm. cc/sec Helium
Control Range:
50 to 1
Mechanical Connection:
Compatible with most popular mass flow controllers. Refer to Figure 2-1.
Electrical Connection:
Card edge, 20 terminals, gold over low stress nickel plated copper. 15-pin
D-Connector (DA-15P)