INFICON PSG55x ATM to Medium Vacuum Gauge (EtherCAT) - Manual (Page 57)

tira85e1 (2013-06) PxG55x.cp
57
Appendix
 [1] www.inficon.com
Operating Manual
PCG550, PCG552, PCG554
tina56d1 (German)
tina56e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein
 [2] www.inficon.com
Operating Manual
PSG550, PSG552, PSG554
tina60d1 (German)
tina60e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein
 [3] ETG.1000.2: Physical Layer service definition and protocol specification
 [4] ETG.1000.3: Data Link Layer service definition
 [5] ETG.1000.4: Data Link Layer protocol specification
 [6] ETG.1000.5: Application Layer service definition
 [7] ETG.1000.6: Application Layer protocol specification
 [8] ETG.1020: EtherCAT Protocol Enhancements
 [9] ETG.2000: EtherCAT Slave Information
 [10] ETG.5001.1: Modular Device Profile – Part 1: General MDP Device
Model
 [11] ETG.5003.1: Semiconductor Device profile – Part 1: Common Device
Profile (CDP)
 [12] ETG.5003.2080: Semiconductor Device profile – Part 2080: Specific
Device Profile (SDP): Vacuum Pressure Gauge
 [13] IEC 61158-x-12 (all parts for type 12): Industrial communication
networks – Fieldbus specifications
 [14] IEC 61784-2: Industrial communication networks – Profiles – Part 2:
Additional fieldbus profiles for real-time networks based on ISO/IEC
8802-3
 [15] SEMI E54 / Draft 5102A: SPECIFICATION FOR SENSOR/ACTUATOR
NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE
GAUGES
 [16] SEMI E52: Practice for referencing gases, gas mixtures and vaporizable
materials used in digital mass flow controllers
A: Literature