INFICON PSG55x ATM to Medium Vacuum Gauge (EtherCAT) - Manual (Page 3)

tira85e1 (2013-06) PxG55x.cp
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This document applies to products of the Pirani Capacitance Diaphragm (PCG550,
PCG552, PCG554) and Pirani Standard Gauges (PSG550, PSG552, PSG554) with
EtherCAT interface.
Part numbers of standard products are indicated below. OEM products have other
part numbers and different parameter settings (e.g. factory setting of setpoint) as
defined in the corresponding ordering information.
3Pxx-0xx-xx8x
Measuring signal
Receptacle
*) Solid state relay
**) Electromechanical relay
Flange
Filament
1  DN 16 ISO-KF
2  DN 16 ISO-KF long tube
4  DN 16 CF-F
5  DN 16 CF-R long tube
6
 DN 25 ISO-KF
D  4 VCR female
E
 8 VCR female
F  1/8" NPT
K  Flange 29×29 mm
M  4 VCR female 90°
N  7/16-20 UNF male
0  mbar
1  Torr
2  Pa
3  micron
1  Tungsten
2  Nickel
3  Ceramic coated
6  Tungsten, galvanically isolated
7  Nickel, galvanically isolated
8  Ceramic coated, galvanically isolated
Unit
0  None
1  Display
2  2 switching functions *)
3  ATM sensor &
2 switching functions *)
4  Display & 2 switching functions *)
5
 Display & ATM sensor &
2 switching functions *)
6  2 switching functions **)
0  FCC
1  D-Sub, 9-pin
2  D-Sub, 15-pin HD
4  D-Sub, 15-pin HD, RS485 INF
0  0.61 ... 10.23 V
1  1.2 ... 8.68 V
2  0.375 ... 5.659 V
3
 1.57 ... 9.05 V
Product family C
 Pirani Capacitance Diaphragm Gauge
I  Pirani Standard Gauge
Display Switching function
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document
correspond to PCG550 gauges with the DN 16 ISO-KF vacuum connection. They
apply to other vacuum connections and to the other gauges by analogy.
We reserve the right to make technical changes without prior notice.
EtherCAT ® Beckhoff Automation GmbH, Deutschland
EP 0689669 B1, 0689670 B1, 0658755 B1
US Patents 5608168, 4031997, 5583297
Validity
Trademark
Patents