INFICON PSG55x ATM to Medium Vacuum Gauge (EtherCAT) - Manual (Page 35)

tira85e1 (2013-06) PxG55x.cp
35
Index SI DataType NV Access PM Name
9001 0x01 UINT RO Sensor Warning
0x02 UINT RO Sensor Alarm
Sensor Warnings
Bit 0
Bit 1
Bit 2…15
0
Electronics Warning
0
Sensor Alarms
Bit 0
Bit 1
Bit 3…15
Diaphragm Failure
Electronics Failure
0
Index SI DataType NV Access PM Name
9010 0x02 REAL x RO Highest Informational
Measurement Value
0x03 REAL x RO Highest Precision
Measurement Value
0x04 REAL x RO Lowest Precision
Measurement Value
Highest Informational Measurement Value: Highest value that the gauge can
measure without a specified accuracy.
Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.
Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.
Index SI DataType NV Access PM Name
9012 0x01 UINT RO Sensor Warning
0x02 UINT RO Sensor Alarm
Sensor Warnings
Bit 0…15
0
Sensor Alarms
Bit 0…15
0
Index SI DataType NV Access PM Name
9020 0x02 REAL x RO Highest Informational
Measurement Value
0x03 REAL x RO Highest Precision
Measurement Value
0x04 REAL x RO Lowest Precision
Measurement Value
4.10.1 Information
Capacitance Diaphragm
Subindex 0x01
Subindex 0x02
4.10.2 Information Common
Subindex 0x02
Subindex 0x03
Subindex 0x04
4.10.3 Information Piezo
Subindex 0x01
Subindex 0x02
4.10.4 Information Common