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INFICON PSG55x ATM to Medium Vacuum Gauge (EtherCAT) User Manual

Page 5

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tira85e1 (2013-06) PxG55x.cp

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4.10

PCG with ATM Information Area (0x9000…0x9FFF)

34

4.10.1

Information Capacitance Diaphragm

35

4.10.2

Information Common

35

4.10.3

Information Piezo

35

4.10.4

Information Common

35

4.10.5

Information Heat Transfer

36

4.10.6

Information Trip Point 1/2

36

4.11

PCG without ATM, Information Area (0x9000…0x9FFF)

37

4.11.1

Information Capacitance Diaphragm

37

4.11.2

Information Common

38

4.11.3

Information Heat Transfer

38

4.11.4

Information Trip Point 1/2

38

4.12

PSG Information Area (0x9000…0x9FFF)

39

4.12.1

Information Common

39

4.12.2

Information Heat Transfer

40

4.12.3

Information Trip Point 1/2

40

4.13

Device Area (0xF000...0xAFFF)

40

4.13.1

Semiconductor Device Profile

40

4.13.2

PCG with ATM Module Profile List

40

4.13.3

PCG without ATM, Module Profile List

41

4.13.4

PSG Module Profile List

41

4.14

Exceptions 41

4.14.1

Active Exception Status

41

4.14.2

PCG with ATM Active Device Warning Details

41

4.14.3

PCG without ATM, Active Device Warning Details

42

4.14.4

PSG Active Device Warning Details

43

4.14.5

PCG with ATM Active Device Error Details

43

4.14.6

PCG without ATM, Active Device Error Details

44

4.14.7

PSG Active Device Error Details

45

4.14.8

PCG with ATM Latched Device Warning Details

45

4.14.9

PCG without ATM, Latched Device Warning Details

46

4.14.10

PSG Latched Device Warning Details

46

4.14.11

PCG with ATM Latched Device Error Details

46

4.14.12

PCG without ATM, Latched Device Error Details

47

4.14.13

PSG Latched Device Error Details

47

4.14.14

PCG with ATM Device Warning Mask

48

4.14.15

PCG without ATM, Device Warning Mask

48

4.14.16

Device Warning Mask

48

4.14.17

PCG with ATM Device Error Mask

49

4.14.18

PCG without ATM Device Error Mask

49

4.14.19

PSG Device Error Mask

49

4.15

Gauge General

50

4.15.1

Combination Gauge

50

4.15.2

Trip Point Output All

50

4.15.3

Input Latch Local Timestamp

51

4.16

Configure Device

51

4.17

Information 52

4.17.1

PCG with ATM Information Device

52

4.17.2

PCG without ATM, Information Device

53

4.17.3

PSG Information Device

53

4.18

Adjust and Reset

54

4.18.1

Command Zero Adjust

54

4.18.2

Full Scale Adjust

55

4.18.3

Device Reset Command

55

4.18.4

Exception Reset Command

56

Appendix 57

A:

Literature 57


For cross-references within this document, the symbol (

→  XY) is used, for cross-

references to further documents, listed under literature, the symbol (

→  [Z]).


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