INFICON PSG55x ATM to Medium Vacuum Gauge (EtherCAT) User Manual
Page 5
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tira85e1 (2013-06) PxG55x.cp
5
4.10
PCG with ATM Information Area (0x9000…0x9FFF)
34
4.10.1
Information Capacitance Diaphragm
35
4.10.2
Information Common
35
4.10.3
Information Piezo
35
4.10.4
Information Common
35
4.10.5
Information Heat Transfer
36
4.10.6
Information Trip Point 1/2
36
4.11
PCG without ATM, Information Area (0x9000…0x9FFF)
37
4.11.1
Information Capacitance Diaphragm
37
4.11.2
Information Common
38
4.11.3
Information Heat Transfer
38
4.11.4
Information Trip Point 1/2
38
4.12
PSG Information Area (0x9000…0x9FFF)
39
4.12.1
Information Common
39
4.12.2
Information Heat Transfer
40
4.12.3
Information Trip Point 1/2
40
4.13
Device Area (0xF000...0xAFFF)
40
4.13.1
Semiconductor Device Profile
40
4.13.2
PCG with ATM Module Profile List
40
4.13.3
PCG without ATM, Module Profile List
41
4.13.4
PSG Module Profile List
41
4.14
Exceptions 41
4.14.1
Active Exception Status
41
4.14.2
PCG with ATM Active Device Warning Details
41
4.14.3
PCG without ATM, Active Device Warning Details
42
4.14.4
PSG Active Device Warning Details
43
4.14.5
PCG with ATM Active Device Error Details
43
4.14.6
PCG without ATM, Active Device Error Details
44
4.14.7
PSG Active Device Error Details
45
4.14.8
PCG with ATM Latched Device Warning Details
45
4.14.9
PCG without ATM, Latched Device Warning Details
46
4.14.10
PSG Latched Device Warning Details
46
4.14.11
PCG with ATM Latched Device Error Details
46
4.14.12
PCG without ATM, Latched Device Error Details
47
4.14.13
PSG Latched Device Error Details
47
4.14.14
PCG with ATM Device Warning Mask
48
4.14.15
PCG without ATM, Device Warning Mask
48
4.14.16
Device Warning Mask
48
4.14.17
PCG with ATM Device Error Mask
49
4.14.18
PCG without ATM Device Error Mask
49
4.14.19
PSG Device Error Mask
49
4.15
Gauge General
50
4.15.1
Combination Gauge
50
4.15.2
Trip Point Output All
50
4.15.3
Input Latch Local Timestamp
51
4.16
Configure Device
51
4.17
Information 52
4.17.1
PCG with ATM Information Device
52
4.17.2
PCG without ATM, Information Device
53
4.17.3
PSG Information Device
53
4.18
Adjust and Reset
54
4.18.1
Command Zero Adjust
54
4.18.2
Full Scale Adjust
55
4.18.3
Device Reset Command
55
4.18.4
Exception Reset Command
56
Appendix 57
A:
Literature 57
For cross-references within this document, the symbol (
→ XY) is used, for cross-
references to further documents, listed under literature, the symbol (
→ [Z]).