INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 71)

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SQM-160 Operating Manual
5.4.16 Command: W
Parameters: . . . . . . . . . . . . . . . . . . . None
Description: . . . . . . . . . . . . . . . . . . . Returns the rate, thickness & frequency for
each sensor simultaneously.
Example: . . . . . . . . . . . . . . . . . . . . . W 0.0 00.78 58.654 5497324.373 00.78
58.668 5497433.978 00.78 58.648
5500330.091 00.79 58.654 5500440.187
00.77 58.655 5500550.287 00.78 58.662
5500660.020
In order: ignore the first 0.00 in the
response. Next: Sensor 1 Rate (Å/s), Sensor 1
Thickness (Å), Sensor 1 Freqency (Hz), Sensor 2 Rate
(Å/s) Sensor 2 Thickness (Å), Sensor 2 Frequency
(Hz), etc.
5.4.17 Command: Y
Parameters: . . . . . . . . . . . . . . . . . . . None.
Description: . . . . . . . . . . . . . . . . . . . Read the Power-Up Reset flag. The
Power-Up Reset flag is set during boot-up of
the SQM-160 and stays set until read
through the RS-232 interface. After the flag is
read, it is reset and will not be set again until
the SQM-160 is power cycled.
Example: . . . . . . . . . . . . . . . . . . . . . Y A1 Power-Up Reset flag is set.
Y A0 Power-Up Reset flag is reset.
5.4.18 Command: Z
Parameters: . . . . . . . . . . . . . . . . . . . None.
Description: . . . . . . . . . . . . . . . . . . . Set all Film and System menu parameters to
defaults. Note that this command can take
over 1 second to complete
Example: . . . . . . . . . . . . . . . . . . . . . Z A All Film and System parameters are set to
defaults.