INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 67)

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SQM-160 Operating Manual
NOTE: CRC calculation examples can be found in section 5.5, CRC Examples, on
page 5-12 .
The response protocol received from the instrument is:
<1 to n data
characters>
The Sync character is always a "!" as in the sent command structure. The Length
character, however, has a decimal 35 added to it instead of 34 like the command
length character. The Response Status character is coded as shown in
Table 5-1 .
Data characters are received using the protocol described in section 5.3 on page
5-6 . The CRC characters are calculated as described above.
5.4 Commands
5.4.1 Command: @
Parameters: . . . . . . . . . . . . . . . . . . . None
Description: . . . . . . . . . . . . . . . . . . . Returns the model number and software
version number.
Example: . . . . . . . . . . . . . . . . . . . . . @ AMON Ver 2.01
5.4.2 Command: A
Parameters: . . . . . . . . . . . . . . . . . . . [1..99], Values | ?
Description: . . . . . . . . . . . . . . . . . . . Film parameters. The parameters available
for change or inspection are Label, Density,
Tooling, Z-Factor, Final Thickness,
Thickness Setpoint, Time Setpoint, Sensor
Average
The parameters are sent/retrieved in that
order. The label is a maximum of 8
characters, and is terminated by a space
character. If you want to send a space
Table 5-1 Response Status
Response Letter Meaning
A Command understood, normal response
B Command understood, but instrument reset
C Invalid command
D Problem with data in command
E Instrument in wrong mode for this command