6 system menu – INFICON SQM-160 Thin Film Deposition Monitor User Manual
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SQM-160 Operating Manual
4.6 System Menu
This menu allows system parameters to be sent to, and read from, a connected
SQM-160. These parameters appear in the System Menu of the SQM-160.
System parameters are not saved in the disk database.
Figure 4-5 System Dialog Box
Save. . . . . . . . . . . . . . . . . . . . . . . . . Sends the on-screen settings to the
SQM-160 and closes the System dialog box.
Close . . . . . . . . . . . . . . . . . . . . . . . . Closes the System dialog box without
sending parameters to the SQM-160.
Read . . . . . . . . . . . . . . . . . . . . . . . . Reads the SQM-160 system menu
parameters into the System dialog box.
Simulate Mode . . . . . . . . . . . . . . . . In simulate mode, the SQM-160 simulates
sensor inputs (for test purposes only).
Freq Display . . . . . . . . . . . . . . . . . . Selects whether or not to display crystal
frequency.
Rate Resolution . . . . . . . . . . . . . . . Selects high (0.01 Å/s) or low (0.1 Å/s) rate
resolution on the SQM-160 main window.
Etch Mode . . . . . . . . . . . . . . . . . . . . Sets the rate and thickness sign to negative
for etching applications.
Filter . . . . . . . . . . . . . . . . . . . . . . . . The number of readings averaged for rate
display. One to twenty are valid.
Timebase. . . . . . . . . . . . . . . . . . . . . The time for a single measurement. 0.15 to
2.0 seconds are valid.