INFICON SQM-160 Thin Film Deposition Monitor User Manual
Sqm-160, Multi-film rate/thickness monitor
Table of contents
Document Outline
- Cover Page
- Title Page
- Trademarks
- Disclaimer
- Copyright
- Declaration Of Conformity
- Warranty
- Table Of Contents
- Chapter 1 Introduction
- Chapter 2 Quick Start
- Chapter 3 Operation
- 3.1 Introduction
- 3.2 Menu Selection
- 3.3 Film Menu
- 3.4 System Menu
- 3.5 Sensor Selection
- 3.6 Sensor Frequency
- 3.7 Sensor Tooling
- 3.8 Display Units
- 3.9 Crystal Life
- 3.10 Zero Thickness
- 3.11 Shutter Operation
- 3.12 Dual Sensors
- 3.13 Rate Sampling
- 3.14 Time Setpoint
- 3.15 Thickness Setpoint
- 3.16 Simulate Mode
- 3.17 Defaulting the Memory
- 3.18 Relay Operation
- 3.19 Analog Output Configuration
- 3.20 I/O Connections
- 3.21 Rack Mounting Procedure
- Chapter 4 SQM-160 Comm Software
- Chapter 5 Communications
- Chapter 6 Troubleshooting and Maintenance
- Chapter 7 Calibration Procedures
- Chapter 8 Measurement and Theory
- Appendix A Material Table