INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 69)

5 - 9
IP
N 07
4-
51
1-
P1
C
SQM-160 Operating Manual
5.4.5 Command: D
Parameters: . . . . . . . . . . . . . . . . . . . 1 to 9
Description: . . . . . . . . . . . . . . . . . . . Sets the active film.
Example: . . . . . . . . . . . . . . . . . . . . . D1 Set the active film to Film #1
5.4.6 Command: J
Parameters: . . . . . . . . . . . . . . . . . . . None.
Description: . . . . . . . . . . . . . . . . . . . Read the number of channels installed. The
number of channels will be either an ASCII
two or six.
Example: . . . . . . . . . . . . . . . . . . . . . J A2 The SQM-160 has two channels available.
5.4.7 Command: L
Parameters: . . . . . . . . . . . . . . . . . . . [1..6]
Description: . . . . . . . . . . . . . . . . . . . Read the current Rate for a channel.
Example: . . . . . . . . . . . . . . . . . . . . . L1 A9.32 Channel one's rate is 9.32 Å/S
5.4.8 Command: M
Parameters: . . . . . . . . . . . . . . . . . . . None.
Description: . . . . . . . . . . . . . . . . . . . Read the current Average Rate.
Example: . . . . . . . . . . . . . . . . . . . . . M A10.42 Average Rate is 10.42 Å/S
5.4.9 Command: N
Parameters: . . . . . . . . . . . . . . . . . . . [1..6]
Description: . . . . . . . . . . . . . . . . . . . Read the current thickness for a channel.
Example: . . . . . . . . . . . . . . . . . . . . . N4 A1.187 Channel four's Thickness is 1.187 kÅ.
5.4.10 Command: O
Parameters: . . . . . . . . . . . . . . . . . . . None.
Description: . . . . . . . . . . . . . . . . . . . Read the current Average Thickness
Example: . . . . . . . . . . . . . . . . . . . . . O A2.376 The current Average Thickness is 2.376
kЕ.