7 depositing a film – INFICON SQM-160 Thin Film Deposition Monitor User Manual
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SQM-160 Operating Manual
2.7 Depositing a Film
If you have followed this Quick Start chapter, you are ready to deposit a film. Follow
the procedure below to begin deposition.
1
Verify Sensor Operation
Verify that the Crystal Status LED for the measuring sensor(s) is illuminated,
and not blinking.
2
Display Rate/Thickness
Display 1 should be displaying Rate on the left and Thickness on the right. If
the Crystal Life display mode is active, press the Xtal Life switch to return to
Rate/Thickness mode. If the Program Mode is active, press Program to return
to normal mode.
3
Zero Thickness
If needed, press the Zero switch to zero the thickness reading.
4
Start Deposition
Apply power to the source evaporation supply. If the SQM-160 shutter relay is
connected, press the Shutter switch to open the source shutter and begin
deposition.
Rate and Thickness displays should begin to move from zero.
If the displays remain at zero, check the system setup to assure that evaporating
is actually taking place. Also check that the deposited material is reaching the
sensor.
If the display is erratic or noisy, first check your sensor connections. See
6.2.2, Troubleshooting Sensors, on page 6-3
for information that can help in
identifying the cause of noisy readings.
If the rate and thickness readings do not match expectations, see the Film
Parameter (Density, Z-Ratio (Z-Factor), Tooling) and Sensor Tooling sections of
Review the remainder of this manual for detailed operational, programming, and
safety information.