INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 52)

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SQM-160 Operating Manual
Average Rate . . . . . . . . . . . . . . . . . The current deposition rate, based on the
average of all sensors assigned to the
selected film.
Rate 1-6 . . . . . . . . . . . . . . . . . . . . . . The individual sensor rate readings.
4.4 Data Log Menu
On the main window, under the File menu, the datalog options may be set. The
datalog option configures the program's data logging function.
Figure 4-3 Datalog Dialog Box
Data is saved in "tab delimited" format for easy viewing, or importing into a
spreadsheet. See example below:
Start: Date: 5/7/02 Time: 14:04:41 Film: ALUM
Time AvgThk AvgRate Thk1 Rate1 ......
0.00 0.000 1.10 0.000 1.10
0.50 0.000 1.11 0.000 1.11
1.00 0.001 1.10 0.001 1.10
1.50 0.001 1.10 0.001 1.10
2.00 0.002 1.10 0.002 1.10
.....
End: Date: 5/7/02 Time: 14:04:44 Film: ALUM
Controls on the Data Log screen are:
None . . . . . . . . . . . . . . . . . . . . . . . . Data is not logged to disk.
Overwrite. . . . . . . . . . . . . . . . . . . . . The log file will be overwritten each time data
logging is started with the Start or Open
Shutter switch on the main window.