INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 27)

2 - 5
IP
N 07
4-
51
1-
P1
C
SQM-160 Operating Manual
Figure 2-3 Typical Vacuum System Wiring
Sensor
Holds the quartz crystal used to measure rate and thickness. Crystals must be
replaced occasionally.
In-Vac Cable
Microdot cable that connects the sensor to the feedthrough.
Feedthrough
Provides isolation between vacuum and atmosphere for electrical and cooling
lines.
6 in. BNC Cable
Provides a flexible connection from the feedthrough to the oscillator. Keep this
cable as short as possible.
Oscillator
Contains the electronics to operate the quartz crystal. The length from the oscillator
to the crystal should be under 40 in. (1 m).
10' BNC Cable
Connects the oscillator to the SQM-160. Lengths up to 100 ft. (30 m) are
acceptable.
Ground Wire
A wire, preferably braided, that connects the vacuum system to the SQM-160
ground terminal.
Sensor
Relay I/O
Option Card
Rate Out Thick Out Sensor 2 Sensor 1
RS-232 4 3
100-120/200-240V~
50/60 Hz 20 W
Fuse T2.5A 250V
6 5
Sensor
In-Vac Cable
Feedthrough
6 in. BNC Cable
Oscillator
10 ft. BNC Cable
Ground Wire
SQM-160 Monitor