INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 18)

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SQM-160 Operating Manual
1.4.3 System Parameters
Measurement Period . . . . . . . . . . . . 0.15 to 2 s
Simulate Mode . . . . . . . . . . . . . . . . . On/Off
Frequency Mode . . . . . . . . . . . . . . . On/Off
Rate Resolution . . . . . . . . . . . . . . . . 0.01/0.1 Å/s
Measurement Filter . . . . . . . . . . . . . 1 to 20 readings
Dual Crystal 1/2 . . . . . . . . . . . . . . . . On/Off
Rate Sampling . . . . . . . . . . . . . . . . . On/Off
RS-232 Baud Rate . . . . . . . . . . . . . . 2.4/4.8/9.6/19.2 kb/s
Etch Mode . . . . . . . . . . . . . . . . . . . . On/Off
Crystal Tooling 1-6 . . . . . . . . . . . . . . 10-399%
Crystal Fail Min/Max. . . . . . . . . . . . . 4.0 to 6.0 MHz / 4.1 to 6.1 MHz
1.4.4 Digital I/O
Digital Inputs. . . . . . . . . . . . . . . . . . . 4
Functions . . . . . . . . . . . . . . . . . . . . . Open Shutter, Close Shutter, Zero
Thickness, Zero Time
Input Rating . . . . . . . . . . . . . . . . . . . 5 V (dc), non-isolated
Relay Outputs. . . . . . . . . . . . . . . . . . 4
Functions . . . . . . . . . . . . . . . . . . . . . Shutter, Sample/Hold or Thickness Setpoint,
Dual Sensor Shutter or Time Setpoint,
Crystal Fail
Relay Rating. . . . . . . . . . . . . . . . . . . 30 V
rms
or 30 V (dc), 2 A maximum