INFICON SQM-160 Thin Film Deposition Monitor - Manual (Page 35)

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SQM-160 Operating Manual
RATEFILT Number of rate readings averaged. 1 – 20 8
RELAY 2 Select Timer to cause relay to close when
time setpoint is reached. Dual causes relay
to close (to activate dual sensor) when
sensor 1 fails. Sensor 2 causes relay to
activate a sensor shutter when Sensor 2 is
assigned to a film. On/Off Timer
SAMPLING When Sampling is ON the sensor shutter
periodically “samples” the rate. After a
period, the shutter closes and the SQM-160
“holds” the same rate reading until the next
sample period. Sample and Hold times are
set in the Film Menu. On/Off Off
BAUDRATE Serial baud rate to PC. 2.4 – 19.2 19.2 kbps
ETCH Sets rate negative for etching. On/Off Off
xTOOLING Tooling value assigned to each sensor. See
the Sensor Tooling section of this chapter. 10 – 399 100 %
RELAYS Assigns normally open or normally closed
operation for each relay. Note: All relays are
open with power off. NO/NC NO
FMIN/MAX Sub-menu sets minimum and maximum
crystal frequencies. 4.00 – 6.00
4.10-6.10
5.00
6.10
MHz
R/T BNDS Rate and Thickness Bounds sub-menu for
analog outputs.
RATE MIN Deposition Rate for zero output (zero Volts). 0 – 999 0 Å/s
RATE MAX Deposition Rate for full scale output (+5
Volts). 9.9 – 999 100 Å/s
THICKMIN Thickness for zero output
(zero Volts). 0 – 99.99 0.00 kÅ
THICKMAX Thickness for full scale output
(+5 Volts). 0 – 99.99 1.00 kÅ
Table 3-2 System Menu (continued)
Display Description Range Default Units