5 unpacking and inspection, 6 parts and options overview, 1 base configurations – INFICON SQM-160 Thin Film Deposition Monitor User Manual
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SQM-160 Operating Manual
1.5 Unpacking and Inspection
1
If the SQM-160 has not been removed from its packaging, do so now.
2
Carefully examine the unit for damage that may have occurred during shipping.
This is especially important if you notice obvious rough handling on the outside
of the container. Immediately report any damage to the carrier and to INFICON.
3
Do not discard the packing materials until you have taken inventory and have
at least performed a power on verification.
4
Take an inventory of your order by referring to your order invoice and the
information contained in
5
To install and setup, see
.
6
For additional information or technical assistance, contact INFICON, refer to
.
1.6 Parts and Options Overview
1.6.1 Base Configurations
SQM-160 . . . . . . . . . . . . . . . . . . . . . . . . .SQM160-X-X-X
Consult the figure below for possible configurations.
Figure 1-2 SQM-160 Configurations
Technical Manual . . . . . . . . . . . . . . . . . . .074-511 on 074-5000-G1 CD
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- Sensistor ILS500 F Leak Detection Filler (90 pages)
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- Sensistor ISH2000P Hydrogen Leak Detector, Panel Model (51 pages)
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- LDS3000 Modular Leak Detector (52 pages)
- LDS3000 Modular Leak Detector Interface description (56 pages)
- BM1000 Bus module (14 pages)
- I/O1000 I/O module (18 pages)
- CU1000 Control unit (24 pages)
- Helium Leak Detector Modul1000 (130 pages)
- Helium Leak Detector Modul1000 Interface description (40 pages)
- UL5000 Dry Helium Leak Detector (108 pages)
- UL5000 Dry Helium Leak Detector Interface description (14 pages)
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- TEK-Mate Refrigerant Leak Detector (12 pages)
- Compass Refrigerant Leak Detector (12 pages)
- D-TEK Select Refrigerant Leak Detector (12 pages)
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