INFICON SID-142 Thin Film Deposition Controller - Manual (Page 73)

Appendix
A. Material Parameters
Material Density ZFactor Material Density ZFactor
Aluminum 2.73 1.08 Magnesium Fluoride 3 1
Aluminum Oxide 3.97 1 Manganese 7.2 0.377
Antimony 6.62 0.768 Manganese Sulfide 3.99 0.94
Arsenic 5.73 0.966 Mercury 13.46 0.74
Barium 3.5 2.1 Molybdenum 10.2 0.257
Beryllium 1.85 0.543 Neodymium Fluoride 6.506 1
Bismuth 9.8 0.79 Neodymium Oxide 7.24 1
Bismuth Oxide 8.9 1 Nickel 8.91 0.331
Boron 2.54 0.389 Niobium 8.57 0.493
Cadmium 8.64 0.682 Niobium Oxide 4.47 1
Cadmium Selenium 5.81 1 Palladium 12 0.357
Cadmium Sulfide 4.83 1.02 Platinum 21.4 0.245
Cadmium Teluridium 5.85 0.98 Potassium Chloride 1.98 2.05
Calcium 1.55 2.62 Rhenium 21.04 0.15
Calcium Fluoride 3.18 0.775 Rhodium 12.41 0.21
Carbon Diamond 3.52 0.22 Samarium 7.54 0.89
Carbon Graphite 2.25 3.26 Scandium 3 0.91
Cerium Fluoride 6.16 1 Selenium 4.82 0.864
Cerium Oxide 7.13 1 Silicon 2.32 0.712
Chromium 7.2 0.305 Silicon Dioxide 2.2 1.07
Chromium Oxide 5.21 1 Silicon Oxide 2.13 0.87
Cobalt 8.71 0.343 Silver 10.5 0.529
Copper 8.93 0.437 Silver Bromide 6.47 1.18
Copper Sulfide 4.6 0.82 Silver Chloride 5.56 1.32
Copper Sulfide B 5.8 0.67 Sodium 0.97 4.8
Copper Sulfide A 5.6 0.69 Sodium Chloride 2.17 1.57
Dysprosium 8.54 0.6 Sulfur 2.07 2.29
Erbium 9.05 0.74 Tantalum 16.6 0.262
Gadolinium 7.89 0.67 Tantalum Oxide 8.2 0.3
Gallium 5.93 0.593 Tellurium 6.25 0.9
Gallium Arsenide 5.31 1.59 Terbium 8.27 0.66
Germanium 5.35 0.516 Thallium 11.85 1.55
Gold 19.3 .381 Thorium Fluoride 6.32 1
Hafnium 13.1 0.36 Tin 7.3 0.724
Hafnium Oxide 9.63 1 Titanium 4.5 0.628
Holnium 8.8 0.58 Titanium Oxide 4.9 1
Indium 7.3 0.841 Titanium Oxide IV 4.26 0.4
Indium Intimnide 5.76 0.769 Tungsten 19.3 0.163
Indium Oxide 7.18 1 Tungsten Carbide 15.6 0.151
Iridium 22.4 0.129 Uranium 18.7 0.238
Iron 7.86 0.349 Vanadium 5.96 0.53
Lanthanum 6.17 0.92 Ytterbium 6.98 1.13
Lanthanum Fluoride 5.94 1 Yttrium 4.34 0.835
Lanthanum Oxide 6.51 1 Yttrium Oxide 5.01 1
Lead 11.3 1.13 Zinc 7.04 0.514
Lead Sulfide 7.5 0.566 Zinc Oxide 5.61 0.556
Lithium 0.53 5.9 Zinc Selenide 5.26 0.722
Lithium Fluoride 2.64 0.774 Zinc Sulfide 4.09 0.775
Magnesium 1.74 1.61 Zirconium Oxide 5.6 1.001