Chapter 2 quick start – INFICON SID-142 Thin Film Deposition Controller User Manual

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Chapter 2

Quick Start

2-7

Edit
Source/Sensor

Select the “Source/Sensor” tab. This tab contains parameters
associated with the physical layout of your evaporation system.
For now, be sure that “Output 1” is selected and “Max Power”
and “Slew Rate” are set to 100. Set the “Tooling” value to 100.
Leave the Source Index as it is.

Save Edits

Click “Close Form” or press the first SoftKey to save this one-
layer process. If you are prompted “Do you want to
change….,” answer Yes to make this the current process.

Your new single-layer process is now the active process in the main window. Notice the
process, layer, and time information above the graph.