INFICON SID-142 Thin Film Deposition Controller - Manual (Page 20)

Chapter 2 Quick Start
2-11
2.7 Multi-Layer CoDeposition Process
Our final example builds on the previous sections. If you have modified the setup of
your process, return to Section 2.4 and adjust the process to those values. When your
single-layer process matches Section 2.4, complete these steps:
Duplicate a
Layer Open the Edit Process dialog. Click on Layer 1, click the
“Layer” tab, then click “Copy Layer.” Now click “Paste Layer.”
A duplicate Gold Sample film will be added as Layer 2. Click
“Paste Layer” again to add a third Gold Sample layer.
Select a
CoDep Film Select Layer 3 in the layers list. Now select “Silver Sample” in
the films dropdown. The layers list will update to show the new
Silver Sample film assigned to Layer 3.
Add a
CoDep Layer Select Layer 3 in the layers list, then click “Cut Layer.” Now
select Layer 1. Click “Paste CoDep.” The Silver Sample film
will be added below Gold Sample as a codeposition layer.
(Your setup should match the picture below.)
We now have two layers in our process. Layer 1 has Gold being deposited from source
Output 1 and Silver is being codeposited on Output 2. Layer 2 is Gold alone.