INFICON SID-142 Thin Film Deposition Controller - Manual (Page 39)

Chapter 3 SQS-142 Software
3-14
In codeposition, a layer may have multiple films, with each material using a different
output and sensor selection for control. However, a layer cannot have the same output
assigned to more than one film. If you try to assign the same output to multiple films in
a layer, an error message will be displayed. Also, reassigning a film to a different output
may impact other stored processes. If the change would create an output conflict in
another process, an error message is displayed.
Sensor Tooling: Adjusts for sensor deposition rates that differ from the substrate
deposition rate. For example, if the sensor sees only 50% of the substrate rate, set the
value to 50%. Setting Tooling to 0% causes a sensor to be ignored for this film.