Chapter 6 computer interface – INFICON SID-142 Thin Film Deposition Controller User Manual
Page 70

Chapter 6 Computer Interface
6-5
@UP;06;
02
Start Process
@UP;02
@UP;06
03
Stop Process
04
Start Layer
05
Stop Layer
06
Start Next layer
07
Auto Mode
08
Manual Mode
09
Zero Thickness
10
Force Final Thickness
2n
Output n Power (Manual Mode Only)
@UP;21;50 (Set Output 1 to 50%)
Query/Update Layer:
@QL;
01
Film Name
(Example: Set Layer 1, Output 1 film to My Film)
@UL;01;1;1;MyFilm
02
Material
03
Start Rate (A/s)
04
Start Thickness (kA)
05
Time SP (mm:ss)
06
Thickness SP (kA)
07
Start Mode (0/1)
08
Substrate Index (0 to 15)
1n
Ramp n Start Thickness (n=1 to 9)
2n
Ramp n Ramp Time (n=1 to 9)
3n
Ramp n New Rate (n=1 to 9)
Query/Update Film:
@QF;
@UF;
01
P Term
02
I Term
03
D Term
04
Shutter Delay Status (0/1)
05
Shutter Timeout
06
Shutter Accuracy
07
Control Error Status (0/1/2)
08
Control Error Accuracy
09
Rate Sampling Status (0/1/2)
10
Sample Accuracy
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