beautypg.com

Chapter 6 computer interface – INFICON SID-142 Thin Film Deposition Controller User Manual

Page 70

background image

Chapter 6 Computer Interface

6-5

@UP;06;

02

Start Process

@UP;02
@UP;06

03

Stop Process

04

Start Layer

05

Stop Layer

06

Start Next layer

07

Auto Mode

08

Manual Mode

09

Zero Thickness

10

Force Final Thickness

2n

Output n Power (Manual Mode Only)

@UP;21;50 (Set Output 1 to 50%)

Query/Update Layer:

@QL;;;
@UL;;;

01

Film Name

(Example: Set Layer 1, Output 1 film to My Film)
@UL;01;1;1;MyFilm

02

Material

03

Start Rate (A/s)

04

Start Thickness (kA)

05

Time SP (mm:ss)

06

Thickness SP (kA)

07

Start Mode (0/1)

08

Substrate Index (0 to 15)

1n

Ramp n Start Thickness (n=1 to 9)

2n

Ramp n Ramp Time (n=1 to 9)

3n

Ramp n New Rate (n=1 to 9)

Query/Update Film:

@QF;;;
@UF;;;;

01

P Term

02

I Term

03

D Term

04

Shutter Delay Status (0/1)

05

Shutter Timeout

06

Shutter Accuracy

07

Control Error Status (0/1/2)

08

Control Error Accuracy

09

Rate Sampling Status (0/1/2)

10

Sample Accuracy