INFICON SID-142 Thin Film Deposition Controller - Manual (Page 60)

Chapter 4 SQM-142 Card
4-5
4.6 SQM-142 Specifications
Sensor Inputs ...................................................................4 (BNC)
Input Frequency................................................................1 to 10 MHz
Input Type ........................................................................Active Oscillator
Sample Period ...................................................................1 to 2 sec.
Thickness Resolution* ........................................................2Å @ .25sec.
.025Å @ 2sec.
Thickness Accuracy* ..........................................................5% + 1 count
Control Outputs ................................................................2 (dual phone jack)
Output Voltage..................................................................0 to
±
10VDC
Output Resolution .............................................................15 bits
Output Impedance ............................................................1 Kohm
Computer Interface
Interface Type ..................................................................16 bit ISA
IRQ Select........................................................................5, 10, 11, 12, 14, 15
Address Select .................................................................140, 180, 1C0, 220
•
Density=1, Z-Factor=1, Sensor Freq.=6MHz