INFICON SID-142 Thin Film Deposition Controller - Manual (Page 19)

Chapter 2 Quick Start
2-10
2.6 SoftKey Functions
As you have seen, the SoftKey functions remain constant during deposition. Spend a
few minutes to become familiar with each of these SoftKey functions.
STOP/ABORT Starts the first layer of a process when START is displayed.
Aborts the process when ABORT is shown.
Once aborted, a process restarts at the pre-conditioning phase
of the first layer.
START/STOP
LAYER Restarts a stopped layer, or starts a layer that has been
designated “Manual Start” in the process database. During
deposition, stops the current layer.
Once a layer is stopped, pressing START LAYER restarts the
current layer at the preconditioning phase.
AUTO->
MAN Toggles the source output between PID and manual control.
When AUTO->MAN is shown, pressing this switch causes the
source output to hold at the current power. You may adjust the
output using the settings ribbon. Because the PID loop is not
running, you can manually set the output power to different
levels and observe the associated deposition rate.
When MAN->AUTO is shown, pressing the switch places the
output under PID control as defined by the process database.
ZERO Resets the thickness reading to zero. This is useful in
Simulate Mode for preventing the deposition phase from
ending because final thickness has been reached. As you
change PID parameters, press “ZERO” from time to time to
keep the process running.
NEXT
FILM Sequences the setting ribbon through each Film in a
codeposition layer.
NEXT
SETTING When the settings ribbon is shown, sequences the setting knob
action through each of the displayed parameters.