INFICON SID-142 Thin Film Deposition Controller - Manual (Page 33)

Chapter 3 SQS-142 Software
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Hint: It’s usually best to copy an existing layer, then paste several temporary layers
of that type. Next, assign the films that you want to each of the temporary layers.
When selecting films for codeposition, remember that each film in a codeposited
layer must be assigned to a different source output! Now use “Cut Layer” on the
temporary layers, and “Paste CoDep” to assign each temporary layer to the desired
codeposition layer. The Multi-Layer CoDeposition Process section of Chapter 2
illustrates this concept.
Film: Selects the film that is assigned to the selected layer. Changing a layer’s film also
changes the film related parameters for that layer (i.e. preconditioning, PID, material,
etc.)
Initial Rate: Sets the initial rate setpoint for the selected layer. If no rate ramps are
defined for the layer, this is the rate setpoint for the entire layer.
Final Thickness: Sets the endpoint thickness for the selected layer. When final
thickness is reached, deposition is stopped for that layer and the feed/hold phase is
entered.
Time Setpoint: Sets an arbitrary time, after deposition begins, when the time setpoint
relay is activated.
Thickness Limit: Sets an arbitrary thickness when the thickness limit relay is activated.
Auto/Manual Start: Determines whether a layer begins automatically upon completion
of the previous layer. If Manual Start is selected, the previous layer ends at its idle
power and waits for the user to push the Start Layer switch.
Substrate Index: If using a substrate indexer, assigns the substrate to a specific angle
or placement value (0-15). These values are sent to the digital I/O PLC at the beginning
of each layer for interfacing to a specific indexer. See System Setup and Digital I/O for
other settings that pertain to the substrate index.