INFICON SID-142 Thin Film Deposition Controller - Manual (Page 71)

Chapter 6 Computer Interface
6-6
11 Sample Time
12 Sample Hold
13 Ramp 1 Power
14 Ramp 1 Time
15 Soak 1 Time
16 Ramp 2 Power
17 Ramp 2 Time
18 Soak 2 Time
19 Feed Power
20 Feed Ramp Time
21 Feed Time
22 Idle Power
23 Idle Ramp Time
24 Output (1-4)
25 Source Index
26 Max Power
27 Slew Rate
28 Material
3n Tooling n (n=1 to 8)
Query Measurement: @QM;
1n Output n Power (n=1 to 4)
2n Output n Rate
3n Output n Thickness
4n Output n Deviation
5n Sensor n Rate (n=1 to 8)
6n Sensor n Thickness
7n Sensor n Frequency
8n Sensor n % Life
Query Utility: @QU;
01 SQM142 Version
02 SQM142 Mode (0/1)
03 SQM142 Period
04 SQM142 Filter
05 SQM142 Slave Enabled (0/1)
06 Front Panel Enabled (0/1)
11 SID142 Software Version
12 SID142 Operating System
13 SID-142 Computer Name