INFICON SID-142 Thin Film Deposition Controller - Manual (Page 54)

Chapter 3 SQS-142 Software
3-29
Material Parameters
Name ...............................................................................12 characters
Density..............................................................................0.40 to 99.99 gm/cm
3
Z-Factor ...........................................................................0.100 to 9.900
Computer Interface
Type ................................................................................RS-232
Protocol ...........................................................................Text string with checksum
Digital Inputs (available only with PLC option)
Start Process....................................................................
Stop Process....................................................................
Start Layer .......................................................................
Stop Layer .......................................................................
Start Next Layer................................................................
Zero Thickness .................................................................
Force Final Thickness ......................................................
Substrate Index Complete
Source Index Complete
Relay Outputs (available only with PLC option)
Source Shutter..................................................................1 to 4
Sensor Shutter..................................................................1 to 8
All Crystal Fail...................................................................
All Crystal Good................................................................
Process Running...............................................................
Process Stopped ..............................................................
Process Active..................................................................
Deposit Phase ..................................................................
Pre-Cond Phase ...............................................................
Feed/Idle Phase................................................................
Manual Mode....................................................................
Max Power .......................................................................
Thickness Setpoint ............................................................
Time Setpoint ...................................................................
Final Thickness.................................................................
Substrate Index Select ......................................................0 to 15
Source Index (Pocket) Select.............................................0 to 15
Security
User Name .......................................................................16 characters
Password .........................................................................8 characters
Access .............................................................................3 levels