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INFICON SID-142 Thin Film Deposition Controller User Manual

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Chapter 1

Introduction

1-2

1.2 SQM-142 Deposition Control Card

Sigma’s SQM-142 card installs in a computer ISA slot, and provides the interface to the
vacuum deposition system. Each card measures up to four quartz sensors via BNC
inputs, and supplies the control signal for two evaporation sources via a dual phone
plug output. Up to two cards can be installed in a computer, creating an eight input, four
output, codeposition controller.

The SQM-142 card is supplied with demonstration software written in Visual Basic and
LabView, including complete source code. The SQM-142 card and a Pentium computer
with Windows form a basic deposition control system (without digital I/O capabilities).

1.3 SQS-142 CoDeposition Control Software

Included with the SID-142 is Sigma’s SQS-142 software, a Windows-based program
that provides all of the functions required for an eight sensor, four output, codeposition
process. It is optimized for use with the Setting Knob and six SoftKeys of our SID-142
controller. However, it will run on any Win9X system with our SQM-142 card installed.